Grid-shaped coupling inhibition structure of wheel-type horizontal-axis gyroscope
A technology of horizontal axis and gyroscope, which is applied in the direction of gyroscope effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., and can solve the problems affecting the performance of the horizontal axis gyroscope.
Active Publication Date: 2021-04-09
PEKING UNIV
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Problems solved by technology
[0005] Ideally, the horizontal-axis gyroscope does not produce out-of-plane displacement when there is no angular velocity input in the driving state. However, due to the existence of process errors, such as the existence of etching inclination, the horizontal-axis gyroscope will produce out-of-plane displacement when the driving state is without angular velocity input. Generates an output signal that is in quadrature with the detection signal and seriously affects the device performance of the horizontal axis gyroscope
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[0012] Such as figure 1 As shown, the applicable wheeled horizontal axis gyroscope structure of the present invention is generally composed of driving combs [101(a), 101(b), 101(c), 101(d)] symmetrically distributed about the geometric center, driving detection combs Teeth [102(a), 102(b), 102(c), 102(d)], outer frame 103, inner frame 104, central sensitive mass 105, bottom detection electrodes and anchor points fixedly connected to the bottom [1001 , 1002] composition. Such as figure 1 As shown in the wheeled horizontal axis gyroscope, the outer frame 103 is connected to the anchor point 1001 by driving the folded beam [106(a), 106(b), 106(c), 106(d)], the outer frame 103 and the sensitive mass 105 is connected through the outer frame connecting beam 107, the inner frame 104 and the sensitive mass 105 are connected through the inner frame connecting beam 108, and the inner frame 104 is connected with the anchor point 1002 at the center through the central connecting beam 10...
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The invention discloses a coupling inhibition structure for a vibrating wheel type horizontal axis gyroscope. The wheel type horizontal axis gyroscopes comprise a single-detection-axis horizontal axis gyroscope and a double-detection-axis horizontal axis gyroscope. The coupling inhibition structure suitable for the wheel type horizontal axis gyroscope is in a grid shape and is characterized in that every two coupling inhibition structures form a group and are distributed in a central symmetry mode relative to the geometric center. The coupling suppression electrode is also of a grid-shaped structure, and the coupling suppression electrode and the grid-shaped suppression structure are distributed in a crossed mode. The structure has the advantages that due to the existence of machining errors, the horizontal axis gyroscope can generate out-of-plane displacement to generate coupling signals when no angular velocity is input in the driving state, and direct-current voltage is applied to the bottom coupling suppression electrode; and due to overlapping of the grid-bar-shaped structure and the bottom coupling electrode, the electrostatic force is generated to act on the grid-shaped structure to balance out-of-plane displacement so as to suppress a coupling signal; and by adjusting the direct-current voltage on the coupling suppression electrode, a coupling signal is reduced to the minimum, so that the device performance of the horizontal axis gyroscope is remarkably improved.
Description
Technical field: [0001] The invention relates to a bar-shaped coupling suppression structure for a wheeled horizontal axis gyroscope, which belongs to the technical field of micro-electromechanical inertial sensor structure design. Background technique: [0002] A gyroscope is a device used to detect the angular velocity of an object's motion. Micro-electromechanical gyroscopes have the advantages of small size, light weight, low cost, low power consumption, and easy integration. They have been widely used in aviation, aerospace, weapons, automobiles, and consumer electronics. [0003] The inertial measurement unit (IMU) is a unit composed of a single-axis, two-axis or three-axis gyroscope and an accelerometer. It can simultaneously measure the acceleration and angular velocity of the three orthogonal axes of the object. After a series of data processing, the object can be obtained. Information such as speed, displacement, direction, attitude, etc. has been widely used in f...
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IPC IPC(8): G01C19/5712
CPCG01C19/5712
Inventor 赵前程杨海兵崔健
Owner PEKING UNIV