Micro-nano electrode array chip for single-cell horizontal brain function positioning and preparation method thereof
An electrode array and brain function technology, applied in medical science, sensors, catheters, etc., can solve the problems of accurate functional positioning of unfavorable target areas, lack of contrast channels, large size of detection sites, etc., to avoid low information and fault tolerance. The effect of high and large safety distance
Active Publication Date: 2021-04-30
AEROSPACE INFORMATION RES INST CAS
View PDF5 Cites 2 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
The University of Michigan prepared a micro-nano electrode array with a detection site diameter of 20 μm based on MEMS technology for in vivo neural information detection. However, due to the large size of the detection site, the spatial resolution is still at the multi-cellular level, which is not conducive to Precise functional positioning of the target area
The Heinrich Heine University in Germany has developed a single-channel electrode with a detection site diameter of 4 μm. However, due to the small number of channels and the lack of contrast channels, it is not conducive to eliminating the chance of information
Therefore, there is an urgent need for multi-channel single-cell level detection tools that can achieve precise functional positioning of brain target regions, but this also poses challenges to the processing technology of neural information detection chips
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
preparation example Construction
[0075] Specifically, such as Image 6 As shown, the operation steps of the preparation method for preparing the micro-nano electrode array chip for the above-mentioned single-cell level brain function localization are:
[0076] Operation S1: Select SOI front-side silicon as the substrate, and perform the first photolithography process, including glue removal, pre-baking, photolithography, development, and post-baking, and transplant the pattern of the conductive layer to the surface of the substrate;
[0077] Operation S2: Using a sputtering process to cover the above-mentioned pattern with the seed layer and conductive metal, and then using stripping technology to remove excess metal outside the pattern of the detection site, reference electrode, counter electrode, lead, and pad to form a conductive layer;
[0078] Operation S3: performing a chemical vapor deposition process on the conductive layer to cover the surface of the chip;
[0079] Operation S4: Carry out the second...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a micro-nano electrode array chip for single-cell horizontal brain function positioning, which comprises a substrate layer made of a rigid insulating material, a conducting layer which is prepared above the substrate layer and used for detecting a nerve electrophysiological signal and a nerve electrochemical signal through arranged detection sites and electrodes, and transmitting the detected nerve electrophysiology signals and nerve electrochemistry signals to a rear-end acquisition instrument in real time, andan insulating layer is formed above the conducting layer. The invention further provides a preparation method of the micro-nano electrode array chip for single-cell horizontal brain function positioning. The invention further provides a use method of the micro-nano electrode array chip for single-cell horizontal brain function positioning.
Description
technical field [0001] The present disclosure relates to the technical field of micro-electromechanical systems, in particular to a micro-nano electrode array chip for single-cell level brain function localization and a preparation method thereof. Background technique [0002] Accurate positioning of the brain target area is a key factor in determining the final effect of surgery. However, the accuracy of the stereotaxic instrument itself, the flow of intracranial air, and the loss of cerebrospinal fluid during the operation can all lead to brain tissue displacement. How to realize the precise functional positioning of the brain target area has become the key to improving the success rate of the operation. [0003] The human brain contains multiple functional nuclei, each of which is interdependent and cooperates to form a rich and complex neural network. In the process of functional positioning, the spatial resolution determines the accuracy of target positioning. The hig...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More IPC IPC(8): A61B5/294A61B5/388A61B5/1473
CPCA61B5/1473A61B5/14546A61B5/6868
Inventor 张禹蔡新霞宋轶琳徐声伟谢精玉肖桂花何恩慧王蜜霞邢宇
Owner AEROSPACE INFORMATION RES INST CAS