Method for determining at least one temperature compensation parameter for compensation of temperature effects on measured values of sensor system

Abstract

The invention relates to a method for determining a temperature compensation parameter for compensation of temperature effects on measured values of a sensor system having a sensor unit, a temperature sensor unit, a signal processing unit to determine a temperature compensation parameter and to compensate temperature effects on the measured values of the sensor unit. The method includes: monitoring the measuring situation of the sensor unit; determining whether the current measuring situation corresponds to a reference measuring situation; monitoring the temperature of the sensor unit and determining whether the current temperature lies within a predefined temperature range; detecting at least two different temperature values within the predefined temperature range and detecting the respective associated measured values of the sensor measuring variable when the current measuring situation corresponds to a reference measuring situation; determining at least one temperature compensation parameter based on the at least one reference measured value of the sensor measuring variable X, the at least two different temperature values, and the associated measured values of the sensor measuring variable X.

Description

technical field [0001] The invention relates to a method for determining at least one temperature compensation parameter for compensating temperature influences on measured values ​​of a sensor system. Furthermore, the invention relates to a MEMS sensor system, which is designed to carry out the method. Background technique [0002] The continuous miniaturization of the sensor surfaces of known sensor systems, in particular MEMS sensor systems, leads to technical challenges such as integration of microcontrollers into sensor systems for covering different application scenarios, or temperature-defined shifts and Component-individual corrections for sensitivity inaccuracies. [0003] Temperature influences of the sensor unit can lead to inaccuracies in the temperature definition of the measurement results of the sensor unit. Currently, such inaccuracies can be corrected by adjusting the measurement results of the corresponding sensor system for individual temperature support...

AI Technical Summary

Problems solved by technology

Such an adjustment with a reference sensor system but ignores the influence of individual factors, such as manufacturing-defined individual characteristics of each sensor system, which can lead to additional measurement inaccuracies

[0004] Cost-limited, the measurements currently used to correct temperature-defined measurement inaccuracies can only be carried out for individual temperature support points during manufacture in the factory

Such measurements for only individual temperature support points are however not sufficient to achieve a comprehensive correction

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