Lithium niobate modulator chip and manufacturing method thereof

Abstract

The invention relates to the technical field of optical fiber communication and sensing, in particular to a lithium niobate modulator chip and a manufacturing method thereof, and the manufacturing method of the lithium niobate modulator chip comprises the following steps that: a layer of mask is manufactured on the upper surface of a lithium niobate substrate; an optical waveguide mask window is etched on the mask in the Y-axis direction, and an optical waveguide is manufactured on the upper surface of the lithium niobate substrate in the optical waveguide mask window; metal electrodes are manufactured on the two sides of the optical waveguide respectively, and a light input face, a light output face and the + / -Z face of the lithium niobate substrate are cut to form a lithium niobate modulator chip; conductive films are respectively manufactured on the + / -Z face of the lithium niobate modulator chip, and a conductive coating layer is manufactured on the lower surface of the lithium niobate modulator chip, so that the conductive films on the + / -Z face are connected and conducted through the conductive coating layer. According to the scheme, the influence of the pyroelectric effect of the lithium niobate crystal on the performance of the lithium niobate modulator in the temperature changing process can be effectively reduced, and the full-temperature performance of the lithium niobate modulator is improved.

Description

【Technical field】 [0001] The invention relates to the technical field of optical fiber communication and sensing, in particular to a lithium niobate modulator chip and a manufacturing method thereof. 【Background technique】 [0002] Lithium niobate modulator is a very important optical modulator, which can modulate the phase, amplitude and polarization state of light waves, and is widely used in high-speed optical fiber communication networks, optical fiber sensors, etc. However, due to the pyroelectric properties of lithium niobate crystal, when its temperature changes, lithium niobate crystal will show a phenomenon of spontaneous polarization, forming an electric field on the ±Z surface of the crystal. The electric field direction overlaps with the maximum electro-optic coefficient γ33 of the lithium niobate crystal, which will change the effective refractive index of the lithium niobate waveguide, thereby affecting the all-temperature optical performance of the lithium nio...

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Problems solved by technology

The direction of this electric field overlaps with the maximum electro-optic coefficient γ33 of the lithium niobate crystal, which will change the effective refractive index of the lithium niobate waveguide, thus affecting the all-temperature optical performance of the lithium niobate modulator

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