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A based on α-in 2 the se 3 Humidity sensor of two-dimensional nanosheet and preparation method thereof

A humidity sensor, -in2se3 technology, used in instruments, scientific instruments, measuring devices, etc., can solve the problems of unfriendly functional groups and doping atoms, no biocompatibility, complicated preparation process, etc., and achieves short response time, Simple preparation method and good repeatability

Active Publication Date: 2022-05-27
XIANGTAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the preparation process is complicated, and some functional groups and dopant atoms are not environmentally friendly and not biocompatible

Method used

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  • A based on α-in <sub>2</sub> the se <sub>3</sub> Humidity sensor of two-dimensional nanosheet and preparation method thereof
  • A based on α-in <sub>2</sub> the se <sub>3</sub> Humidity sensor of two-dimensional nanosheet and preparation method thereof
  • A based on α-in <sub>2</sub> the se <sub>3</sub> Humidity sensor of two-dimensional nanosheet and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Based on α-In 2 Se 3 Humidity sensor of two-dimensional nanosheets, including: two-dimensional α-In 2 Se 3 Humidity sensitive layer 1, substrate 2, electrodes, silver paste 4 and two silver wires 5;

[0051] Two-dimensional α-In 2 Se 3 The humidity sensitive layer 1, the electrodes and the silver paste 4 are sequentially arranged on the upper surface of the substrate 2;

[0052] The two silver wires 5 are both connected to the silver paste 4, and the ends of the two silver wires 5 away from the silver paste 4 are respectively in contact with the probes of the impedance analyzer.

[0053] In this embodiment, the two-dimensional α-In 2 Se 3 The humidity sensitive layer 1 is a monolithic nanosheet material with a thickness of about 200nm.

[0054] In this embodiment, the substrate 2 is SiO 2 / Si substrate 2 .

[0055] In this embodiment, the electrodes are Au electrodes.

[0056] Based on α-In 2 Se 3 The preparation method of the humidity sensor of two-dimensi...

Embodiment 2

[0064] Based on α-In 2 Se 3 Humidity sensor of two-dimensional nanosheets, including: two-dimensional α-In 2 Se 3 Humidity sensitive layer 1, substrate 2, electrodes, silver paste 4 and two silver wires 5;

[0065] Two-dimensional α-In 2 Se 3 The humidity sensitive layer 1, the electrodes and the silver paste 4 are sequentially arranged on the upper surface of the substrate 2;

[0066] The two silver wires 5 are connected to the silver paste 4, and the ends of the two silver wires 5 away from the silver paste 4 are respectively in contact with the probes of the impedance analyzer (NSB-4000).

[0067] In this embodiment, the two-dimensional α-In 2 Se 3 The humidity sensitive layer 1 is a monolithic nanosheet material with a thickness of about 200nm.

[0068] In this embodiment, the substrate 2 is a PET substrate 2 .

[0069] In this embodiment, the electrodes are Au electrodes.

[0070] Based on α-In 2 Se 3 The preparation method of the humidity sensor of two-dimens...

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Abstract

The invention discloses a method based on α‑In 2 Se 3 Humidity sensor of 2D nanosheets, including: 2D α‑In 2 Se 3 Moisture sensitive layer, substrate, electrodes, silver paste and two silver wires; 2D α-In 2 Se 3 The humidity sensitive layer, the electrodes and the silver paste are sequentially arranged on the upper surface of the substrate; two silver wires are connected with the silver paste. In the present invention, two-dimensional α-In 2 Se 3 The humidity sensitive layer is a monolithic nanosheet material used as the humidity sensitive layer of the humidity sensor, which has the characteristics of short response time, small hysteresis and good repeatability.

Description

technical field [0001] The invention relates to the technical field of humidity sensors, in particular to a sensor based on α-In 2 Se 3 Two-dimensional nanosheet humidity sensor and its preparation method. Background technique [0002] Humidity represents the physical quantity of the dryness and humidity of the atmosphere. The most commonly used expression is relative humidity, which is defined as the ratio of the partial pressure of water vapor in the atmosphere to the saturated vapor pressure of water at the same temperature. Humidity is closely related to human life and production. Humidity sensors have been widely used in the growth environment of crops, the production and processing environment of electronic devices, and the storage of medicinal materials for humidity monitoring. [0003] At present, various humidity sensors have been studied, including semiconductor humidity sensors, electrolyte humidity sensors, polymer humidity sensors, and the like. However, thes...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12
CPCG01N27/121G01N27/127
Inventor 王金斌张小娅钟向丽吴祎玮王鑫豪
Owner XIANGTAN UNIV