Unlock instant, AI-driven research and patent intelligence for your innovation.

Treatment method of zone-melting graphite boat

A processing method and technology of graphite boat, which are applied in the treatment of graphite boat and the treatment of area-melted graphite boat, can solve the problems of inability to grind and polish on the machine tool, residual metal impurities, carbon powder falling from the graphite boat, etc., so as to improve product purification. effect of effect

Active Publication Date: 2021-07-16
清远先导材料有限公司
View PDF1 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the purification of graphite boats encounters bottlenecks: (1) the highest ash content can only reach about 5ppm (the purity of 6N products is <1ppm, and the purity of 7N<0.1ppm); (2) when the graphite boat is in the molding process, there will be organic matter (grease, etc.) on the surface and metal impurities residues produced by machining; (3) The zone-fused graphite boat is a special-shaped boat, which cannot be polished and polished on the machine tool, and the surface roughness is generally about 3.2
It has been verified by production experiments that when the roughness of the graphite boat is higher than 0.3, carbon powder will fall off the surface of the graphite boat during the production process, and at the same time, the material will stick to the graphite boat, causing difficulty in demoulding

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Treatment method of zone-melting graphite boat

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] This embodiment discloses a processing method for a zone melting graphite boat, comprising the following steps:

[0028] (1) Water quenching: heat the graphite boat to 450°C, then quickly put the graphite boat into pure water for water quenching, wash and dry to remove the organic and metal impurities remaining in the pores on the surface of the graphite boat during machining;

[0029] (2) Grinding and polishing: Use 1000, 1500, 2000, 3000 mesh silicon carbide sandpaper to polish the graphite boat in turn, and then use wool balls to polish until the surface of the graphite boat becomes bright, and the roughness Ra measured by the roughness detector is 0.3 ;

[0030] (3) Ultrasonic cleaning: set the ultrasonic vibration frequency to 60kHz, and clean it with pure water after 15 minutes;

[0031] (4) No-load heating: put the graphite boat into the quartz tube of the zone furnace, feed hydrogen gas at a flow rate of 4L / min, and heat the graphite boat to 600°C for 12 hours;...

Embodiment 2

[0034] This embodiment discloses a processing method for a zone melting graphite boat, comprising the following steps:

[0035] (1) Water quenching: heat the graphite boat to 500°C, then quickly put the graphite boat into pure water for water quenching, wash and dry to remove the organic matter and metal impurities remaining in the pores on the surface of the graphite boat during machining;

[0036] (2) Grinding and polishing: Use 1000, 1500, 2000, 3000 mesh silicon carbide sandpaper to polish the graphite boat in turn, and then use wool balls to polish until the surface of the graphite boat becomes bright. The roughness Ra measured by the roughness detector is 0.2 ;

[0037] (3) Ultrasonic cleaning: set the ultrasonic vibration frequency to 65kHz, and clean it with pure water after 25 minutes;

[0038] (4) No-load heating: Put the graphite boat into the quartz tube of the zone furnace, feed hydrogen gas at a flow rate of 3L / min, heat the graphite boat to 550°C, and heat for ...

Embodiment 3

[0041] This embodiment discloses a processing method for a zone melting graphite boat, comprising the following steps:

[0042] (1) Water quenching: heat the graphite boat to 500°C, then quickly put the graphite boat into pure water for water quenching, wash and dry to remove the organic and metal impurities remaining in the surface pores of the graphite boat during machining;

[0043] (2) Grinding and polishing: Use 1000, 1500, 2000, 3000 mesh silicon carbide sandpaper to polish the graphite boat in turn, and then use a wool ball to polish until the surface of the graphite boat becomes bright. The roughness Ra measured by the roughness detector is 0.3 ;

[0044] (3) Ultrasonic cleaning: set the ultrasonic vibration frequency to 60kHz, and clean it with pure water after 30 minutes;

[0045] (4) No-load heating: put the graphite boat into the quartz tube of the zone furnace, feed hydrogen gas at a flow rate of 2L / min, and heat the graphite boat to 600°C for 12 hours;

[0046]...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention belongs to the field of high-purity metal materials, and discloses a treatment method of a zone-melting graphite boat. The treatment method comprises the following steps that (1) water quenching is conducted, specifically, the graphite boat is heated to 400 DEG C-500 DEG C, then the graphite boat is quickly put into pure water for water quenching, and drying is conducted after cleaning; (2) grinding and polishing are conducted, specifically, the graphite boat obtained in the step (1) is sequentially subjected to abrasive paper grinding and polishing processes till the surface roughness Ra of the graphite boat is not larger than 0.3; (3) ultrasonic cleaning is conducted, specifically, an ultrasonic cleaning process is conducted on the graphite boat obtained in the step (2); (4) no-load heating is conducted, specifically, the graphite boat obtained in the step (3) is put in a hydrogen atmosphere, the graphite boat is heated to 500 DEG C-600 DEG C, and the temperature is kept; and (5) cooling and storing are conducted, specifically, the graphite boat subjected to heat preservation in the step (4) for a period of time is cooled to the room temperature, the surface is wiped, and storing is conducted. The method can effectively remove impurities on the surface of the graphite boat and non-metal impurities in the graphite boat, and the product purification effect is improved.

Description

technical field [0001] The invention belongs to the field of high-purity metal materials, and relates to a processing method for a zone-melting graphite boat, and more specifically, relates to a processing method for a graphite boat used for zone-melting purification of high-purity metals. Background technique [0002] The preparation method of high-purity metal materials (6N and above) usually adopts the zone melting method (such as tellurium, zinc, cadmium, indium, antimony, aluminum, germanium, etc.), and the zone melting method needs to use graphite boats to hold materials. The material is in direct contact, so the use of graphite boat plays a vital role in the purification effect of the material. [0003] At present, the purification of graphite boats encounters bottlenecks: (1) the highest ash content can only reach about 5ppm (the purity of 6N products is <1ppm, and the purity of 7N<0.1ppm); (2) when the graphite boat is in the molding process, there will be org...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C22B9/16B08B9/08
CPCC22B9/16B08B9/08Y02P10/20
Inventor 黄杰杰何志达李清宇
Owner 清远先导材料有限公司