Ultracrystallite titanium diboride composite coating and preparation method and application thereof
A technology of composite coating and titanium diboride, which is applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of limited application, poor friction and wear performance of coating at high temperature, etc., and achieve improved densification The degree, the effect of improving toughness and increasing hardness
Active Publication Date: 2021-07-27
GUANGDONG UNIV OF TECH
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Problems solved by technology
Therefore, TiB 2 The high-temperature friction and wear properties of the coating are poor, which greatly limits its application in actual industry
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Embodiment 1
[0038] 1. Composite coating machine preparation: This implementation chooses to use an ion beam composite magnetron sputtering coating machine, including a vacuum chamber, a magnetron sputtering source, an ion source and a workpiece support that can rotate at the same time. The workpiece support is installed inside the vacuum chamber; Magnetron sputtering source loaded with 99.8% pure TiB 2 target;
[0039] 2. Substrate pre-cleaning treatment: Use ethanol to ultrasonically clean the YT15 hard alloy sample to be coated, then rinse with deionized water, and dry with dry compressed air to obtain a pretreated substrate;
[0040] 3. Use glow etching to clean the surface of the sample in the vacuum chamber: place the pretreated substrate on the workpiece support in the vacuum chamber, the rotation speed of the workpiece support is 1-1.2rpm, and the vacuum chamber is evacuated to 5.0×10 –3 Below Pa, then feed 150~180sccm argon and 100~120sccm krypton into the vacuum chamber, keep th...
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Abstract
The invention belongs to the technical field of surface protective coatings, and particularly relates to an ultracrystalline titanium diboride composite coating and a preparation method and application thereof. The method comprises the steps that firstly, a metal transition layer Cr is deposited on a substrate, then a magnetron sputtering power supply loaded with a TiB2 target material and an electric arc evaporation power supply loaded with a metal Cr target material are started, the magnetron sputtering power supply is controlled to be 2.5-3 kW, and the current of the electric arc evaporation power supply is controlled to be 40-60 A; the electric arc evaporation plating power is 700-800 W; argon is introduced into a chamber, and the air pressure in the vacuum chamber is controlled to be 0.5-0.6 Pa; and the bias voltage of the substrate is set to be -100 V--120 V, and a TiB2 / Cr nano-composite coating with the thickness of 1-1.2 microns is deposited on a Cr transition layer. The coating is simple in preparation process, high in coating quality, good in coating toughness, high in hardness and excellent in wear resistance, and can be widely applied to surface protection of products for machining, mold machining and the like.
Description
technical field [0001] The invention belongs to the technical field of surface protective coatings, and in particular relates to an ultramicrocrystalline titanium diboride composite coating and a preparation method and application thereof. Background technique [0002] Transition metal boride TiB 2 The coating has a series of excellent physical and chemical properties, such as high hardness value, strong chemical inertness, high wear resistance and corrosion resistance, making TiB 2 Coatings have great potential application advantages in many harsh environments. Transition metal boride TiB 2 The coating has a series of excellent physical and chemical properties, such as high hardness value, strong chemical inertness, high wear resistance and corrosion resistance, making TiB 2 Coating has great potential application advantages in many harsh environments [0003] Currently TiB 2 The preparation of the coating mainly includes CVD, PVD, thermal spraying, ion beam assisted d...
Claims
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IPC IPC(8): C23C14/32C23C14/18C23C14/16C23C14/35C23C14/06C23C14/02
CPCC23C14/325C23C14/067C23C14/025C23C14/16C23C14/18C23C14/35Y02T50/60
Inventor 代伟梁云鹏王启民
Owner GUANGDONG UNIV OF TECH