Scanning antenna and method for manufacturing scanning antenna
A technology of scanning antenna and manufacturing method, applied in the field of scanning antenna, can solve the problems of rising cost and high price of phased array antenna, and achieve the effect of improving antenna performance
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[0072] Hereinafter, a scanning antenna, a method of manufacturing the scanning antenna, and a TFT substrate used for the scanning antenna according to the embodiments of the present invention will be described with reference to the drawings. In addition, this invention is not limited to embodiment illustrated below. In addition, embodiment of this invention is not limited to drawing. For example, the thickness of the layer in the cross-sectional view, the size of the conductive portion and the opening portion in the plan view, and the like are examples.
[0073]
[0074] Using the large dielectric constant M(ε M ) Anisotropy (birefringence) of the antenna unit scanning antenna controls the voltage applied to each liquid crystal layer of the antenna unit corresponding to the pixel of the LCD panel, so that the effective dielectric constant of the liquid crystal layer of each antenna unit M(ε M ) is changed to form a two-dimensional pattern by antenna units with different e...
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