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A method for calibrating DC parameters of multiple test channels of a semiconductor testing machine

A technology for testing channels and DC parameters, which is applied in the direction of single semiconductor device testing, measuring electronics, measuring devices, etc., can solve the problems of not being able to better realize the synchronization and timeliness of multiple testing channels, and achieve the solution of DC parameter calibration problem, effect of satisfying synchronicity

Active Publication Date: 2021-11-09
SANDTEK SEMICON TECH (SHANGHAI) LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The diversity, flexibility and complexity of this kind of mathematical processing are not suitable for calibration calculations through solidified hardware circuits, but are more suitable for calibration calculations through software
However, the use of software calculations cannot better achieve the synchronization and timeliness of multiple test channels

Method used

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  • A method for calibrating DC parameters of multiple test channels of a semiconductor testing machine
  • A method for calibrating DC parameters of multiple test channels of a semiconductor testing machine
  • A method for calibrating DC parameters of multiple test channels of a semiconductor testing machine

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Experimental program
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Effect test

Embodiment 1

[0070] The operating modes of the 8 power supply test channels of the semiconductor testing machine in this embodiment are set to the forward current output mode, and then the 8 power supply test channels are calibrated, specifically including the following steps:

[0071] S1, connect the input ends of the 8 power supply test channels to a linear operation circuit of model AD5560, and then connect the input ends of the 8 linear operation circuits to a nonlinear operation software.

[0072] S2, according to the input digital value-output current value of the 8 power supply test channels, obtain the nonlinear transformation formula in the nonlinear computing software:

[0073] S21, input the same input digital value X to the 8 power supply test channels, and measure the output current value Y of the 8 power supply test channels n , and find the average of the output values ​​of all channels to be calibrated ;

[0074] S22, set each input digital value X s For different value...

Embodiment 2

[0097] The operating modes of the 8 power supply test channels of the semiconductor testing machine in this embodiment are set to negative current output mode, and then the 8 power supply test channels are calibrated, specifically including the following steps:

[0098] S-1, connect the input ends of 8 power supply test channels to a linear operation circuit of model AD5560, and then connect the input ends of the 8 linear operation circuits to a nonlinear operation software.

[0099] S-2, according to the input digital value-output current value of the 8 power supply test channels, obtain the nonlinear transformation formula in the nonlinear computing software:

[0100] S-21, select the power supply test channel 1 as the standard channel, and input 32 input values ​​A to the standard channel in sequence s , and set 32 ​​input values ​​A s For different values, measure the output value B of the standard channel each time s , summarize the obtained data into a table, such as ...

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Abstract

The invention relates to the technical field of semiconductor testing, in particular to a method for calibrating DC parameters of multiple testing channels of a semiconductor testing machine. Including a semiconductor testing machine, the input end of each channel to be calibrated in the semiconductor testing machine is respectively connected to a linear operation circuit module, which is characterized in that it specifically includes the following steps: S1, each linear operation circuit module is jointly connected to a nonlinear operation module; S2 , to obtain the nonlinear transformation formula; S3, to obtain the linear transformation formula of each channel to be calibrated; S4, to write the slope value and the intercept value of the linear transformation formula into the linear operation circuit module; S5, to input a same The input value is calculated to obtain the first intermediate value; S6, the operation is obtained to obtain the second intermediate value; S7, the operation is obtained to obtain the same output value. Compared with the prior art, it not only satisfies the requirements of synchronization and timeliness of multiple test channels, but also solves the problem of DC parameter calibration of multiple test channels.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a method for calibrating DC parameters of multiple testing channels of a semiconductor testing machine. Background technique [0002] In the technical field of semiconductor testing, it is often required that the test signals of multiple test channels act synchronously. For example, when the output voltage of multiple power supply test channels is set to 5.0V at the same time, in order to achieve the effect of synchronous action and optimize the execution efficiency, it is not required to operate all channels one by one through the tester system software, but requires the tester to The system software broadcasts the operation instruction to all pre-selected channels by setting an operation instruction. After receiving the operation instruction, these channels start parallel execution actions at the same time, and then use the parallelism of the test machine system h...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R35/00G01R31/26
CPCG01R31/2601G01R35/005
Inventor 魏津张经祥胡雪原
Owner SANDTEK SEMICON TECH (SHANGHAI) LTD
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