A kind of multi-current channel flip-chip algainpmini-led chip and its preparation method
An algainpmini-led, multi-current technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems affecting the luminous brightness and reliability of the chip, and achieve the effect of solving the current diffusion problem, increasing reflection, and reducing loss.
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[0047] In order to enable those skilled in the art to better understand and implement the technical solution of the present invention, the present invention also provides a method for preparing a multi-current channel flip-chip AlGaInP mini-LED chip, comprising the following steps:
[0048] S1. Provide a GaAs growth substrate (which needs to be removed during the preparation process, so it is not marked in the finished product figure), grow N-type semiconductor layer 5, quantum well layer 4 and P-type semiconductor layer 3 in sequence to obtain an epitaxial wafer;
[0049] S2. Clean the epitaxial wafer, and evaporate a layer of SiO on the side of the epitaxial wafer away from the GaAs growth substrate 2 ;
[0050] S3, provide a substrate 1 of sapphire, vapor-deposit a layer of SiO on one side thereof 2 , align the GaAs growth substrate 1 with the sapphire substrate 1, two layers of SiO 2 In close contact, the bonding is completed to obtain the bonding layer 2;
[0051] S4, ...
Embodiment
[0062] A method for preparing a multi-current channel flip-chip AlGaInP mini-LED chip, comprising the following steps:
[0063] 1. Provide a GaAs growth substrate, and grow an N-type semiconductor layer, a quantum well layer, and a P-type semiconductor layer in sequence;
[0064] 2. Put the epitaxial wafer into the acetone solution and ultrasonically clean it for 15 minutes. After drying, evaporate a layer of SiO on the side of the epitaxial wafer facing away from the GaAs growth substrate. 2 , with a thickness of 2 μm;
[0065] 3. Provide a sapphire substrate, and evaporate a layer of SiO with a thickness of 3 μm on one side 2 , align the two substrates so that the two layers of SiO 2In close contact, the bonding is completed at a temperature of 400°C and a pressure of 16,000Kg;
[0066] 4. Soak the bonded epitaxial wafer in a mixed solution of ammonia water and hydrogen peroxide for 30 minutes, remove the GaAs growth substrate, and expose the N-type semiconductor layer; ...
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