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Defect detection method, device and system based on infrared thermal imaging

A technology for infrared thermal imaging and defect detection, applied in the field of optical detection, can solve the problems of low detection contrast and high resolution, improve the signal-to-noise ratio, overcome random fluctuations, and facilitate automatic detection and screening.

Pending Publication Date: 2021-09-17
觉芯电子(无锡)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above problems in the prior art, the object of the present invention is to provide a defect detection method, device and system based on infrared thermal imaging, which can solve the problems of low detection contrast and high resolution in the prior art

Method used

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  • Defect detection method, device and system based on infrared thermal imaging
  • Defect detection method, device and system based on infrared thermal imaging
  • Defect detection method, device and system based on infrared thermal imaging

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Embodiment 1

[0070] In order to comprehensively detect the surface and internal defects of the test piece and meet the requirements of high-precision detection, the embodiment of this specification provides a defect detection method based on infrared thermal imaging, specifically, as figure 1 As shown, the method includes the following steps:

[0071] S102: Emitting a laser beam in a first direction to the DUT;

[0072] The embodiment of this specification uses thermal imaging technology to achieve high-precision non-destructive testing. First, it is necessary to realize thermal excitation on the surface of the test piece, that is, to use the laser to test the area of ​​the test piece. It should be noted that in order to improve the efficiency of thermal imaging reception, this implementation In the example, the irradiation direction of the laser beam in the first direction is at a certain angle with the object to be tested, and vertical incidence should be avoided. As an option, periodic ...

Embodiment 2

[0124] The embodiment of this specification provides a defect detection system based on infrared thermal imaging, which can realize the above-mentioned defect detection method based on infrared thermal imaging, specifically, as Figure 10 As shown, the system includes a laser 11 and a beam shaping module 12, the beam shaping module 12 is arranged at the light outlet of the laser 11, a beam splitter 13 is arranged in front of the beam shaping module 12, and the laser beam is divided into two by a beam splitting 13 mirrors. beam, so that the two beams of light are respectively irradiated on the left and right parts of the test piece 6 or two groups of test pieces 6 along two different directions, and the test piece 6 is arranged on the translation mechanism 8, and the translation mechanism 8 makes the The parts under test 6 move forward so that each group of parts under test 6 is irradiated by laser light in two different directions, and is detected by imaging with the infrared t...

Embodiment 3

[0129] On the basis of Embodiment 2, the embodiment of this specification provides a defect detection system based on infrared thermal imaging, which can realize the above-mentioned defect detection method based on infrared thermal imaging, specifically, as Figure 11 As shown, the difference between this embodiment and embodiment 2 is:

[0130] After the laser beams are split, they each pass through a beam retarder 141 and 142 and then irradiate the same DUT 6 , and no special translation mechanism needs to be provided under the DUT. By setting the respective delay time intervals of the beam retarders 141 and 142, the irradiation time of the two paths of light has a certain time difference Δt, so as to avoid mutual interference of laser excitation in two directions. For example, the light beam 111 is controlled by the beam retarder 141 at t 0 ~t 1 The light is emitted for a period of time, and then at an interval of Δt, the beam 112 is controlled by the beam retarder 142 at...

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Abstract

The invention discloses a defect detection method, device and system based on infrared thermal imaging. The method comprises the following steps: emitting a laser beam in a first direction to a to-be-detected piece; obtaining thermal imaging information of the surface of the to-be-measured piece, and generating first data; emitting a second direction laser beam to the to-be-measured piece, wherein the second direction intersects with the first direction; acquiring the thermal imaging information of the surface of the to-be-measured piece to generate second data; according to the first data and the second data, acquiring defect information of the surface of the to-be-detected piece is obtained, and exciting, by laser, the to-be-detected piece from two or more different angles in sequence. According to the method, the defect that the contrast ratio of crack defects in some directions is low when irradiation is conducted from a single angle is overcome, the signal-to-noise ratio is increased, and the misdetection ratio is remarkably reduced. According to the method, the detection requirements of a large number of parts on an industrial production line are met, micron-grade high-precision and high-efficiency detection is realized, and automatic detection and screening on the production line can be conveniently realized by matching with a corresponding automatic sorting device.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a defect detection method, device and system based on infrared thermal imaging. Background technique [0002] In the field of industrial production, product testing is an essential part of quality control. For example, in the production of electronic components, automobile parts manufacturing, and aerospace fields, this kind of testing is even more essential. In many cases, users need to carry out online efficient detection of products on the assembly line, and at the same time require the detection rate to be as high as possible, such as 95% or even higher, which puts forward high requirements on the detection methods used. [0003] Manual visual inspection is a traditional and commonly used detection method. Due to its low efficiency and high false detection rate, it cannot meet the detection requirements of large-scale production lines at this stage. Although micro...

Claims

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Application Information

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IPC IPC(8): G01N25/72
CPCG01N25/72
Inventor 马宏
Owner 觉芯电子(无锡)有限公司
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