Broadband Transition Structure from Grounded Coplanar Waveguide to Suspended Microstrip Line

Abstract

A broadband transition structure from a grounded coplanar waveguide to a suspended microstrip line, comprising: first to third substrates stacked sequentially from top to bottom, and a second substrate arranged between the first substrate and the second substrate A ground plane, a second ground plane arranged on the upper surface of the third substrate, a uniformly grounded coplanar waveguide unit, a trapezoidal gradient grounded coplanar waveguide unit, a uniform microstrip line unit, a trapezoidal gradient microstrip line unit, and a suspended microstrip line unit. The present invention combines grounded coplanar waveguide, microstrip line, suspended microstrip line, isosceles trapezoidal gradient structure and isosceles trapezoidal slotted structure of multi-segment conduction tape, without increasing the number of substrate layers and without additional mechanical transfer structure In the case of a large working bandwidth, the transition structure from the grounded coplanar waveguide to the suspended microstrip line is realized, which meets the needs of signal broadband, low-loss transmission and circuit probe testing in three-dimensional integrated circuits.

Description

technical field [0001] The invention relates to a technology in the field of three-dimensional integrated circuits, in particular to a broadband transition structure from a grounded coplanar waveguide to a suspended microstrip line. Background technique [0002] Suspended microstrip line technology refers to a transmission structure that hollows out the substrate or substrate under the microstrip line and fills it with air. Since the relative permittivity of air is approximately 1, the suspended microstrip line can not only significantly reduce the dielectric loss, but also increase the size of the transmission line appropriately, thereby reducing the sensitivity of circuit characteristics to processing tolerances. In 3D integrated circuits, suspended microstrip lines are usually placed on the top layer to implement high-performance integrated passive devices and integrated antennas. For testing with probes, the suspended microstrip line needs to be connected to a grounded ...

AI Technical Summary

Problems solved by technology

In a three-dimensional integrated circuit, the structure and size of the grounded coplanar waveguide unit and the suspended microstrip line unit are significantly different, and the connection will introduce a large discontinuity, which will affect the transition structure and the working bandwidth of the entire transmission network.

However, the transition structure of the existing suspended microstrip line focuses on the transition between the suspended microstrip line and the traditional metal waveguide, and the metal waveguide is bulky and requires additional mechanical structures to connect with the suspended microstrip line, which is not suitable for three-dimensional integrated circuit

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