Sand blasting device applied to semiconductor spare parts in TFT-LCD (Thin Film Transistor-Liquid Crystal Display) industry

Abstract

The invention discloses a sand blasting device applied to semiconductor spare parts in TFT-LCD (thin film transistor-liquid crystal display) industry. The sand blasting device comprises a sand blasting room and a collecting box with a hollow upper part, a driving device is arranged on the collecting box, and the driving device comprises a motor, a first transmission gear driven by a motor shaft, a second transmission gear connected to a rotating shaft and meshed with the first transmission gear, a round roller rotating coaxially with the second transmission gear, a balancing weight connected to the motor and coaxial with the first transmission gear to serve as a balance weight, and transmission equipment arranged outside the sand blasting room, a protruding block is arranged on the round roller, and a shifting block is arranged on the protruding block to drive the transmission equipment to conduct feeding motion.

Description

technical field [0001] The invention relates to the technical field of electrode application sandblasting equipment, in particular to a sandblasting device applied to semiconductor spare parts in the TFT-LCD industry. Background technique [0002] A component in an electronic or electrical device or device that is used as two terminals for input or output current in a conductive medium (solid, gas, vacuum or electrolytic solution). The pole where the current is input is called the anode or positive pole, and the pole where the current is released is called the cathode or negative pole. There are various types of electrodes, such as cathodes, anodes, welding electrodes, electric furnace electrodes, etc. [0003] In the operation of the etching machine in the TFT-LCD (Thin Film Transistor Liquid Crystal Display) industry, plasma is generated in the vacuum chamber. The structure of this plasma processing device is a parallel flat plate type. electrode, ESC), and the lower ele...

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Problems solved by technology

The sandblasting operation before fusion spraying requires a complete sandblasting equipment. The existing sandblasting equipment uses a fixed mechanical arm of the robot. The arm is equipped with a spray gun to blast the electrode plane. It takes at least 5 hours to fill a panel. To speed up production efficiency, the productivity of existing equipment cannot be improved. On the basis of the original, the feed rate of the manipulator can be deliberately increased, which will result in insufficient roughness and affect the quality of sandblasting; 2. Due to the long-term buried in the sandblasting room, the equipment driving equipment is covered in the room during sandblasting, and the long-term contact with the sand material and sand dust can easily lead to different feeding increments of the equipment, making the sandblasting efficiency poor. The same position of the panel is covered with spraying, which eventually leads to excessive roughness of the electrodes. Therefore, we propose a sandblasting device for semiconductor spare parts in the TFT-LCD industry.

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