Unlock instant, AI-driven research and patent intelligence for your innovation.

Performance evaluation method for cleaning organic pollutants by low-pressure oxygen plasma

A technology of organic pollutants and plasma, applied in the field of plasma cleaning, can solve the problems that cannot be used to characterize the removal ability of organic pollutants, and cannot be used to evaluate the performance of low-pressure oxygen plasma

Inactive Publication Date: 2021-11-16
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The measurement of electrons includes the measurement of electron temperature, electron density and electron velocity distribution, etc., which reflects the overall state of the plasma, but has nothing to do with the organic pollutants to be cleaned, and cannot be used to characterize the removal ability of low-pressure oxygen plasma to organic pollutants
The measurement of excited particles in a specific state can determine the excited concentration of a specific particle, which can reflect the ability of the particle to remove organic pollutants in the plasma, but there are many active groups participating in the removal of organic pollutants in low-pressure oxygen plasma, especially different The active oxygen atoms in the excited state have a direct effect on the removal of pollutants, so they cannot be used to evaluate the performance of low-pressure oxygen plasma in the cleaning process of organic pollutants

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Performance evaluation method for cleaning organic pollutants by low-pressure oxygen plasma
  • Performance evaluation method for cleaning organic pollutants by low-pressure oxygen plasma

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A performance evaluation method for cleaning organic pollutants with low-pressure oxygen plasma, comprising the following steps:

[0025] (Such as figure 1 ) Step 1. Test the peak wavelength and peak transmittance of the uncontaminated AR-coated optical element A; the process is: R f = 1 -T f ; where: peak transmittance T f Measured by a spectrophotometer or a calibrated energy meter on an anti-reflective coated optical element in an uncontaminated state, R f is the residual reflectance.

[0026] Step 2. Test the change of the peak transmittance of the anti-reflection coating during the low-pressure oxygen plasma treatment process; the process is: use the mixture of air, organic pollutants, and coating materials as the film layer; according to the remaining reflectance of the film layer R f Calculate the refractive index of the film layer n f : R f =( n 0 n g -n f 2 ) / ( n 0 n g + n f 2 ); where: n 0 is the refractive index of air, n g is ...

Embodiment 2

[0034] (Table 1) The sol-gel silica anti-reflection coating based on fused silica substrate has a refractive index of 1.44; according to the results of the uncontaminated state, the original porosity of the coating layer f i About 0.48980; if the pollutant is DBP (dibutyl phthalate) the chemical formula is C 16 h 22 o 4 , the molecular weight is 278.34, the refractive index is 1.4911, and the density is 1.053g / cm3; by time and CH density (equivalent space concentration C 2 ), the fitting is 0.00002269s -1 The evaluation coefficient of α , to evaluate the ability of the low-pressure plasma cleaning system to clean DBP, which is convenient for subsequent demand design or selection of an appropriate plasma cleaning system.

[0035] Table 1

[0036]

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
densityaaaaaaaaaa
refractive indexaaaaaaaaaa
refractive indexaaaaaaaaaa
Login to View More

Abstract

The invention discloses a performance evaluation method for cleaning organic pollutants by using low-pressure oxygen plasma. The method comprises the following steps: acquiring the spatial concentration of specific hydrocarbon organic pollutants by using peak transmittance; rewriting the determined equivalent concentration of the specific hydrocarbon organic pollutants according to the number of hydrogen atoms distributed according to the number of carbon atoms; constructing the evaluation coefficient by the chemical reaction constant, the active oxygen atom space concentration and the number of hydrogen atoms distributed according to the number of carbon atoms and determined through fitting. According to the method, the evaluation coefficient of the low-pressure oxygen plasma is obtained by using the hydrocarbon pollutant equivalent space concentration based on transmittance test, and the method can be used for evaluating the cleaning performance of the low-pressure oxygen plasma in different states on specific hydrocarbon organic pollutants in the porous antireflection film.

Description

technical field [0001] The invention relates to the technical field of plasma cleaning, in particular to a performance evaluation method for cleaning organic pollutants with low-pressure oxygen plasma. Background technique [0002] In high-power and high-energy laser devices, the organic pollutants in the porous anti-reflection coating of high-throughput optical components will seriously affect the light transmission performance and laser damage threshold of the components. Oxygen plasma based on low pressure can effectively treat organic pollutants, but the cleaning effect on different types of organic pollutants is different, and different process conditions will also change the state of oxygen plasma and thus change the cleaning performance. Therefore, determining the performance of low-pressure oxygen plasma required for cleaning specific organic pollutants facilitates efficient cleaning of organic pollutants, and plays an important supporting role in the engineering app...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/31B08B7/00
CPCG01N15/088G01N33/00
Inventor 刘昊杨敏李玉海苗心向牛龙飞蒋一岚吕海兵袁晓东
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS