Element detection device and method based on mass spectrum technology
A detection device and detection method technology, applied in the field of mass spectrometry analysis, can solve problems such as not much optimization, elements cannot be detected, etc., and achieve the effects of improved pulse waveform, optimized detection limit, and high sensitivity
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Embodiment 1
[0043] figure 1 A schematic structural diagram of an element detection device based on mass spectrometry technology in an embodiment of the present invention is given, as figure 1 As shown, the element detection device based on mass spectrometry technology includes:
[0044] Mass analysis unit 81 and detector 91, mass analysis unit 81 and detector 91 are prior art in this field;
[0045] An ion source 61, the ion source 61 adopts a magnetron electron cyclotron resonance ion source, and ions emitted from the ion source 61 enter the first ion lens group 71, the second ion lens group 72 and the mass analysis unit 81 in sequence;
[0046] The first ion lens group 71, the ions passing through the first ion lens group 71 are focused;
[0047] The second ion lens group 72 , the kinetic energy of the ions passing through the second ion lens group 72 is matched with the mass analysis unit 81 .
[0048] In order to reduce the kinetic energy of the outgoing ions so as to facilitate th...
Embodiment 2
[0065] An application example of the element detection device based on mass spectrometry technology according to Embodiment 1 of the present invention.
[0066] In this application example, the first ion lens group includes three single lenses, which respectively apply high voltage-negative low voltage-positive voltage to focus the ionized single-charged ions and efficiently transmit them into the subsequent system; the second ion lens group Composed of multiple ion lenses, the voltage applied to the multiple ion lenses in turn is positive and negative alternately, and the kinetic energy of the ions passing through the second ion lens group drops by two orders of magnitude to tens of electron volts; the third ion lens The group adopts a right-angle deflection lens to effectively remove neutral particles.
[0067] Such as figure 2 As shown, in the mass analysis unit, the first grid 21 and the second grid 22 are grounded, which ensures the equipotential of the first grid 21 an...
Embodiment 3
[0080] The application example of the element detection device based on mass spectrometry technology according to Embodiment 1 of the present invention is different from Embodiment 2 in that:
[0081] Such as Figure 4 As shown, in the mass analysis unit, the first grid 21 and the second grid 22 are grounded, which ensures the equipotential of the first grid 21 and the second grid 22; The ions pass through the multiple electrodes, and use the voltage dividing resistor to divide the voltage of the multiple electrodes, so that the electric field strength in the first ion acceleration area is uniform; the power supply applies a positive pulse voltage to the repeller 11, and a negative pulse voltage to the pulling electrode 12 ;
[0082] The reflective area includes a first reflective field and a second reflective field, the first reflective field includes a second incident grid 32 and a reflective electrode 41, and the second reflective field includes the reflective electrode 41...
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