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Molecular pump spindle movement amount measuring device and measuring method

A molecular pump and quantity measurement technology, which is applied to measurement devices, mechanical measurement devices, and mechanical devices. Effect

Active Publication Date: 2021-12-24
KYKY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the disadvantages in the prior art of estimating the accumulation of the molecular pump spindle by pressing the palm of the hand, not only relying on the practical experience of the assembler, but also the measurement data cannot be quantified and the accuracy cannot be guaranteed , so as to provide a molecular pump spindle accumulation measurement device and measurement method

Method used

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  • Molecular pump spindle movement amount measuring device and measuring method
  • Molecular pump spindle movement amount measuring device and measuring method
  • Molecular pump spindle movement amount measuring device and measuring method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] The molecular pump spindle accumulation measurement device provided in this embodiment includes: a pressure applying module, a support frame 1 and a screw micrometer 2 .

[0041] In this embodiment, the pressure application module has a horizontal bearing platform 3 for placing the molecular pump, and a pressure plate 4 that can move up and down is arranged directly above the bearing platform 3, and the circumferential direction of the pressure plate 4 has a vertical outward The protruding detection rod 5, the pressure plate 4 is used to apply axial pressure to the molecular pump main shaft 6. The support frame 1 has a first support portion 18 and a second support portion 13 which are perpendicular to each other, and the first support portion 18 has a first state which is kept horizontal and a second state which is kept vertical. The first supporting part 18 in the first state is suitable for carrying the screw micrometer 2, so that the screw micrometer 2 is vertically ...

Embodiment 2

[0046] The molecular pump spindle accumulation measurement method provided in this embodiment includes the following steps:

[0047] S1: After placing the molecular pump vertically on the bearing platform 3 of the pressure applying module, reset the indication of the pressure indicator 12 to zero.

[0048] S2: The first support part 18 is vertically placed on the top surface of the molecular pump, and the first support part is compressed downward to make it flush with the molecular pump main shaft 6, and the deformation amount of the first support part is calculated, namely The sinkage of the molecular pump spindle. The first supporting part 18 is placed vertically and the counterweight 20 abuts against the top surface of the molecular pump shell, and the plane where the first supporting part 18 is located and the axis of the molecular pump main shaft 6 are in the same plane as possible.

[0049] Paint the paint with color on the bottom end face of the detection rod 5 located...

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Abstract

The invention provides a molecular pump spindle movement amount measuring device and measuring method, and relates to the technical field of detection equipment. The measuring device comprises a pressure applying module, a supporting frame and a micrometer caliper, wherein the supporting frame is provided with a first supporting part and a second supporting part which are perpendicular to each other; the first supporting part has a first state of keeping horizontal and a second state of keeping vertical; the first supporting part in the first state bears the micrometer caliper, and the micrometer caliper is used for measuring the vertical displacement of a detection rod; and the first supporting part in the second state is placed on the top surface of a molecular pump and is used for assisting in measuring the extension length of a molecular pump spindle. According to the molecular pump spindle movement amount measuring device and measuring method provided by the invention, the extension part of the molecular pump spindle which is vertically arranged is measured, so that the movement amount of the molecular pump spindle caused by gravity is obtained; and by means of the micrometer caliper and the pressure applying assembly, the movement amount produced by the molecular pump spindle due to the preset pressure is measured, and the movement amount of the molecular pump spindle is quantified by the measuring device, so that the precision is higher than the precision of an estimated value.

Description

technical field [0001] The invention relates to the technical field of detection equipment, in particular to a molecular pump spindle accumulation measuring device and a measuring method. Background technique [0002] Molecular pump is a commonly used equipment for obtaining vacuum. There is a cavity inside it, and a high-speed motor is installed in the cavity. Air outlet. Under special working conditions, the axial displacement of the molecular pump spindle will be greater than 0.15mm, so that the high-speed rotor is easily scratched with the static plate and static plate in the pump, resulting in broken pump phenomenon. [0003] At present, molecular pump assemblers rely on their experience to measure with their palms. This method usually has a strong dependence on the practical experience of the assemblers. Not only the measurement data cannot be quantified, but also the measurement accuracy cannot be fully guaranteed, especially in molecular pumps. When the theoretical...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D27/00G01B5/02
CPCF04D27/001G01B5/02
Inventor 何跃李赏
Owner KYKY TECH