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A measuring device and measuring method for the accumulation of a molecular pump spindle

A technology of molecular pump and volume measurement, which is applied in the direction of measuring devices, mechanical measuring devices, and mechanical devices, etc. It can solve the problems of unguaranteed accuracy and unquantifiable measurement data, and achieve low manufacturing cost, high precision, and reduced spindle cost. volume effect

Active Publication Date: 2022-03-22
KYKY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the disadvantages in the prior art of estimating the accumulation of the molecular pump spindle by pressing the palm of the hand, not only relying on the practical experience of the assembler, but also the measurement data cannot be quantified and the accuracy cannot be guaranteed , so as to provide a molecular pump spindle accumulation measurement device and measurement method

Method used

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  • A measuring device and measuring method for the accumulation of a molecular pump spindle
  • A measuring device and measuring method for the accumulation of a molecular pump spindle
  • A measuring device and measuring method for the accumulation of a molecular pump spindle

Examples

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Comparison scheme
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Embodiment 1

[0040] The molecular pump spindle accumulation measurement device provided in this embodiment includes: a pressure applying module, a support frame 1 and a screw micrometer 2 .

[0041] In this embodiment, the pressure application module has a horizontal bearing platform 3 for placing the molecular pump, and a pressure plate 4 that can move up and down is arranged directly above the bearing platform 3, and the circumferential direction of the pressure plate 4 has a vertical outward The protruding detection rod 5, the pressure plate 4 is used to apply axial pressure to the molecular pump main shaft 6. The support frame 1 has a first support portion 18 and a second support portion 13 which are perpendicular to each other, and the first support portion 18 has a first state which is kept horizontal and a second state which is kept vertical. The first supporting part 18 in the first state is suitable for carrying the screw micrometer 2, so that the screw micrometer 2 is vertically ...

Embodiment 2

[0046] The molecular pump spindle accumulation measurement method provided in this embodiment includes the following steps:

[0047] S1: After placing the molecular pump vertically on the bearing platform 3 of the pressure applying module, reset the indication of the pressure indicator 12 to zero.

[0048] S2: The first support part 18 is vertically placed on the top surface of the molecular pump, and the first support part is compressed downward to make it flush with the molecular pump main shaft 6, and the deformation amount of the first support part is calculated, namely The sinkage of the molecular pump spindle. The first supporting part 18 is placed vertically and the counterweight 20 abuts against the top surface of the molecular pump shell, and the plane where the first supporting part 18 is located and the axis of the molecular pump main shaft 6 are in the same plane as possible.

[0049] Paint the paint with color on the bottom end face of the detection rod 5 located...

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Abstract

The invention provides a molecular pump spindle accumulation measurement device and measurement method, which relate to the technical field of detection equipment. The measurement device includes: a pressure applying module, a support frame and a spiral micrometer. The support frame has a first support part and a The second support part, the first support part has a first state of keeping horizontal and a second state of keeping vertical; the first support part in the first state carries a screw micrometer, and the screw micrometer is used to measure the detection rod The vertical displacement; the first support part in the second state is placed on the top surface of the molecular pump. The first support part is used to assist in measuring the extension length of the molecular pump main shaft. The present invention measures the protruding part of the molecular pump main shaft arranged vertically, and obtains the accumulation momentum of the molecular pump main shaft due to gravity; with the help of a screw micrometer and a pressure component, it measures the molecular pump main shaft due to the preset pressure. The accumulated momentum of production The measuring device has quantified the accumulated momentum of the molecular pump spindle, which is more accurate than the estimated value.

Description

technical field [0001] The invention relates to the technical field of detection equipment, in particular to a molecular pump spindle accumulation measuring device and a measuring method. Background technique [0002] Molecular pump is a commonly used equipment for obtaining vacuum. There is a cavity inside it, and a high-speed motor is installed in the cavity. Air outlet. Under special working conditions, the axial displacement of the molecular pump spindle will be greater than 0.15mm, so that the high-speed rotor is easily scratched with the static plate and static plate in the pump, resulting in broken pump phenomenon. [0003] At present, molecular pump assemblers rely on their experience to measure with their palms. This method usually has a strong dependence on the practical experience of the assemblers. Not only the measurement data cannot be quantified, but also the measurement accuracy cannot be fully guaranteed, especially in molecular pumps. When the theoretical...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D27/00G01B5/02
CPCF04D27/001G01B5/02
Inventor 何跃李赏
Owner KYKY TECH