A measuring device and measuring method for the accumulation of a molecular pump spindle
A technology of molecular pump and volume measurement, which is applied in the direction of measuring devices, mechanical measuring devices, and mechanical devices, etc. It can solve the problems of unguaranteed accuracy and unquantifiable measurement data, and achieve low manufacturing cost, high precision, and reduced spindle cost. volume effect
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Embodiment 1
[0040] The molecular pump spindle accumulation measurement device provided in this embodiment includes: a pressure applying module, a support frame 1 and a screw micrometer 2 .
[0041] In this embodiment, the pressure application module has a horizontal bearing platform 3 for placing the molecular pump, and a pressure plate 4 that can move up and down is arranged directly above the bearing platform 3, and the circumferential direction of the pressure plate 4 has a vertical outward The protruding detection rod 5, the pressure plate 4 is used to apply axial pressure to the molecular pump main shaft 6. The support frame 1 has a first support portion 18 and a second support portion 13 which are perpendicular to each other, and the first support portion 18 has a first state which is kept horizontal and a second state which is kept vertical. The first supporting part 18 in the first state is suitable for carrying the screw micrometer 2, so that the screw micrometer 2 is vertically ...
Embodiment 2
[0046] The molecular pump spindle accumulation measurement method provided in this embodiment includes the following steps:
[0047] S1: After placing the molecular pump vertically on the bearing platform 3 of the pressure applying module, reset the indication of the pressure indicator 12 to zero.
[0048] S2: The first support part 18 is vertically placed on the top surface of the molecular pump, and the first support part is compressed downward to make it flush with the molecular pump main shaft 6, and the deformation amount of the first support part is calculated, namely The sinkage of the molecular pump spindle. The first supporting part 18 is placed vertically and the counterweight 20 abuts against the top surface of the molecular pump shell, and the plane where the first supporting part 18 is located and the axis of the molecular pump main shaft 6 are in the same plane as possible.
[0049] Paint the paint with color on the bottom end face of the detection rod 5 located...
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