Grabbing device and aerial transport vehicle

Abstract

The invention provides a grabbing device and an aerial transport vehicle, which are applied in the technical field of automatic control, wherein the grabbing device includes: a substrate, a motor, a two-way screw, a first support seat, a second support seat, a first clamping mechanism, The second clamping mechanism and the first sensing detection part, the motor drives the two-way four-rod, the two-way screw rod drives the first clamping mechanism and the second clamping mechanism to move, and the first sensing detection part is used to detect the first clamping mechanism The relative position with the second clamping mechanism, and when the relative position satisfies the first preset position, the motor is triggered to turn off the output. The two clamping mechanisms are driven by the motor combined with the first sensing and detecting part. The overall structure of the grasping device is simple, the equipment is small in size and light in weight, and the clamping distance can be precisely controlled. Excessive clamping of the target object ensures production efficiency and production safety during handling.

Description

technical field [0001] The invention belongs to the technical field of automatic control, and more precisely relates to semiconductor manufacturing equipment, in particular to a grabbing device and an aerial transport vehicle. Background technique [0002] In a semiconductor manufacturing factory, an aerial transport vehicle (also called a crane) used for transporting wafer boxes in the air is usually hoisted with a grabbing device (such as a gripper), and the wafer box is grabbed by the grabbing device. [0003] In the existing aerial transport vehicles, the structure of the grabbing device is complicated, the volume is large, and the weight of the equipment is heavy. There are many restrictions on the application occasions of the aerial transport vehicles, such as complicated control methods, such as taking up a large space in the sky, such as requiring aerial rails Can withstand the movement of heavier equipment, etc. [0004] Based on this, the present application provi...

AI Technical Summary

Problems solved by technology

[0003] In the existing aerial transport vehicles, the structure of the grabbing device is complicated, it occupies a large volume, and the weight of the equipment is heavy. There are many restrictions on the application occasions of the aerial transport vehicles, such as complex control methods, such as taking up a large space in the sky, such as requiring aerial rails Can withstand the movement of heavier equipment, etc.

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