Substrate upturning mechanism and substrate detection method
A technology of substrate and driving mechanism, applied in nonlinear optics, instruments, optics, etc., can solve the problems of increasing process complexity and affecting the consistency of detection in different areas, so as to improve the macroscopic detection field, save detection time, and simplify the process. The effect of the operation
Pending Publication Date: 2022-01-21
JIANGSU HONGXIN YITAI INTELLIGENT EQUIP CO LTD
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[0003] In the prior art, when inspecting a large-size substrate, because the entire substrate cannot enter a detection field of view, the substrate needs to be moved vertically up and down for sub-area inspection. The angle between the substrate and the horizontal plane is usually between 60°-90° during inspection, and the angle is not 90°. ° when the substrate moves up and down and the distance between the detection point and the substrate detection part changes, it will affect the consistency of detection in different areas, and the adjustment of the substrate from the initial position to the detection position usually requires two steps of rotation and movement, which increases the complexity of the process
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[0035] Specific embodiments of the present disclosure will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present disclosure, and are not intended to limit the present disclosure.
[0036] In the present disclosure, the orientation nouns "upper and lower" are generally defined based on the drawing directions of the drawings unless stated otherwise. "Inside and outside" refers to the inside and outside of the relevant parts. In addition, the terms "first", "second", etc. are only used for distinguishing descriptions, and should not be understood as indicating or implying relative importance.
[0037] Such as Figure 1-4 As shown, the present disclosure provides a substrate upturning mechanism 10, including a base 11, a first driving mechanism 13, a connecting rod 15, a second driving mechanism 17 and a substrate supporting device 19, th...
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The invention relates to a substrate upturning mechanism and a substrate detection method. The substrate upturning mechanism comprises a base, a first driving mechanism, a connecting rod, a second driving mechanism and a substrate supporting device. The first driving mechanism is fixed to the base, one end of the second driving mechanism is rotationally connected to the base, the first end of the connecting rod is rotationally connected with the driving end of the first driving mechanism, the second end of the connecting rod is rotationally connected with the second driving mechanism, and the substrate supporting device is connected with the driving end of the second driving mechanism. The detection consistency of different areas can be ensured, the macroscopic detection visual field is improved, the detection rate is increased, and the technological operation process is simplified.
Description
technical field [0001] The present disclosure relates to the technical field of substrate detection, and in particular, to a substrate flip-up mechanism and a substrate detection method. Background technique [0002] While the display industry in mainland China is developing rapidly, the global display industry is also facing new challenges. The large-scale production of traditional LCD panels has been in a situation of oversupply. How to develop the potential of new technologies has become the focus of display companies. As the upstream enterprises of the display industry, the requirements for defect detection and management in the process of display panel production are also increasing. come higher. Therefore, equipment for on-line automatic detection and analysis of various defects such as point defects, surface defects, short-circuit defects, and open-circuit defects in the process of panel production backplane, packaging, and touch screens has gradually been put on the...
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IPC IPC(8): G02F1/13
CPCG02F1/1309
Inventor 张亚男周涛权永春朴成秀
Owner JIANGSU HONGXIN YITAI INTELLIGENT EQUIP CO LTD