SF6 decomposition component gas detection method and device based on photoacoustic spectrometry
A technology for decomposing components and photoacoustic spectroscopy, which is used in measurement devices, material analysis by optical means, and material analysis. It can solve problems such as noise interference, low sensitivity, and inability to achieve online detection, and reduce noise interference. , high sensitivity, low cost effect
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[0033] In order to make the object, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The embodiments described in this application are only some embodiments of the present invention, not all embodiments. Based on the spirit of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts all belong to the protection scope of the present invention.
[0034] The present invention utilizes the method of difference, has designed a kind of device that is used for detecting its decomposition product SO2F2 and SOF mixed gas of detecting under SF6 background gas, as figure 1 As shown, the device includes: an air inlet and outlet unit, a laser light source 8 , a pressure gauge 6 , a light concentrating unit, a resonant photoacoustic p...
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