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Bidirectional indexing apparatus

A two-way rotation and indexing technology, applied in the direction of coating, gaseous chemical plating, discharge tube, etc.

Pending Publication Date: 2022-02-01
LAM RES CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the inability to perform gap adjustment can be a significant drawback in modern semiconductor processes, especially when, for example, one seeks to optimize chamber conditions for creating nanoscale structures in plasma-enhanced chemical vapor deposition (PECVD) processes

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  • Bidirectional indexing apparatus
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Embodiment Construction

[0025] The description that follows includes systems, methods, techniques, instruction sequences, and computing machine program products that implement illustrative embodiments of the disclosure. In the ensuing description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the example embodiments. It will be apparent, however, to one skilled in the art that the present disclosure may be practiced without these specific details.

[0026] Portions of the disclosure of this patent document may contain material that is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright rights. The following statement applies to any data described below and in the drawings that form part of this document: Copyright La...

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Abstract

In an example embodiment, a bidirectional indexing apparatus includes a plurality of bidirectional indexing heads that can operate independently of each other or in concert to adjust a gap between a substrate and a pedestal in a substrate processing chamber. In some embodiments, a bidirectional indexing head comprises a base; a rotatable plate rotatable relative to the base, the rotatable plate including a plurality of profiled pockets each defining a camming surface therein; and a plurality of camming pins, each disposed to act on the camming surface of a respective profiled pocket to move the rotatable plate in a first or second rotatable direction when actuated.

Description

[0001] priority claim [0002] This application claims priority to Vintila et al., U.S. Patent Application No. 62 / 864,994, filed June 21, 2019, entitled "Bidirectional Indexing Apparatus," the entire disclosure of which is incorporated herein by reference. technical field [0003] The present disclosure generally relates to a bi-directional indexing device for a substrate processing chamber. In an exemplary embodiment, the bidirectional indexing apparatus includes a plurality of bidirectional indexing heads that can operate independently of each other or in cooperation to adjust the gap between the substrate and the susceptor in the substrate processing chamber. Background technique [0004] During some substrate processing operations, a substrate is supported on a pedestal within a processing chamber. Typically, the height or gap between the substrate and pedestal is not adjustable. However, the inability to perform gap tuning can be a significant drawback in modern semic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/50C23C16/458
CPCC23C16/50C23C16/4581H01L21/68742C23C16/4583C23C16/509H01J37/32733B23Q3/067
Inventor 阿德里亚娜·文蒂拉马修·斯科特·莫罗
Owner LAM RES CORP