Unlock instant, AI-driven research and patent intelligence for your innovation.

Manufacturing method and optical deflector

A manufacturing method and technology for optical deflectors, applied in the field of optical deflectors, can solve the problems of increasing deflection angle and resonance frequency, and achieve the effect of uniform film thickness

Pending Publication Date: 2022-02-08
STANLEY ELECTRIC CO LTD
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, although the optical deflector is made of the same SOI, the resonance frequency of the mirror portion around the first rotation axis increases, and the deflection angle of the mirror portion around the second rotation axis also increases.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Manufacturing method and optical deflector
  • Manufacturing method and optical deflector
  • Manufacturing method and optical deflector

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0122] exist Figure 7 Forming region 10a of the optical deflector, only the movable member in the movable frame portion 14 is set to a non-etching region 40. As a result, the active layer 34, a cavity 43i is formed on the back surface side of the mirror portion 11 and the torsion bar 12, a cavity 43o back side of the actuator 15 is formed outside the piezoelectric.

[0123] In the light deflector 10a. Mirror portion 11 becomes lightweight, and therefore, as the ratio of the moment of inertia I i / I M Is further increased, the effect of suppressing abnormal vibration is improved.

Embodiment 2

[0125] exist Figure 8 The optical deflector 10b, the inner side of the movable element in the piezoelectric actuator 13-forming region 14 and the movable frame portion 40 is set to a non-etching region. As a result, the active layer 34, a cavity 43i is formed on the back side of the mirror portion 11, a cavity 43o on the outside of the back surface side of the piezo-electric actuator 15 is formed.

[0126] Accordingly, the light deflector 10a, the light deflector 10 around the rotation axis Ax of the deflection angle increases. Further, since the mirror portion 11 becomes light weight, the I i / I M It is further increased, improving the effect of suppressing abnormal vibration.

Embodiment 3

[0128] exist Figure 9 10c of the optical deflector, the movable mirror member 11 and the movable frame section forming region 14 is set to the non-etched region 40. As a result, the active layer 34, actuation of the actuator 13, the back side of a cavity formed inside the piezoelectric 43i, 43o actuator has a cavity 15 formed in the back surface side of the piezoelectric outside.

[0129] In the optical deflector 10c, the four inner side of the piezoelectric actuator 13 becomes lightweight, the rigidity of the movable frame portion 14 is relatively increased accordingly, thereby increasing the image 3 In (c) and (d) the effect of suppressing abnormal vibration shown in FIG.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Provided is a method of manufacturing an optical deflector, in which a piezoelectric film layer having a uniform film thickness is formed on a substrate layer in spite of etching of the substrate layer and abnormal vibration of a movable support part can be suppressed. A cavity 43 that is open to an SiO2 layer 35 side by etching an SOI wafer 30 from the SiO2 layer 35 side is formed in a formation region of an external piezoelectric actuator 15a, and an exposure surface of the cavity 43 is covered with an SiO2 layer 45. Next, the SiO2 layer 35 of the SOI wafer 30 and a support layer 52 of an SOI wafer 50 are joined to each other to manufacture an SOI wafer 56 in which the cavity 43 is enclosed. Next, after a recess part 63 is formed on the rear surface side of the SOI wafer 56, anisotropic dry etching is performed from the rear surface side in the depth direction of the recess part 63 to remove the SiO2 layer 45.

Description

Technical field [0001] The present invention relates to a MEMS: and a method of manufacturing a light deflector (Micro Electro Mechanical Systems MEMS) optical deflector. Background technique [0002] MEMS are known light deflector (Patent Document 1, Patent Document 2). [0003] Patent Document 1, the optical deflector includes: a mirror portion; movable support portion; fixed support portion; a first piezoelectric actuator, which is interposed between the mirror portion and the movable support unit, the mirror unit about the first axis of rotation reciprocally rotated at a resonance frequency; and the second piezoelectric actuator, interposed between the movable frame and the fixed support portion, about the second rotational axis intersecting the first axis of rotation of the mirror portion of a low frequency than the resonance non-resonant frequency of the reciprocating rotation. [0004] In Patent Document 1, the optical deflector, and further, the first piezo actuator and a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08B81B3/00B81C1/00G02B26/10H10N30/057H10N30/082H10N30/20
CPCG02B26/0858G02B26/101H10N30/20H10N30/057H10N30/082
Inventor 千叶广文
Owner STANLEY ELECTRIC CO LTD