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Chip test tool and test system

A technology for testing tooling and testing systems, which is applied in measuring devices, electronic circuit testing, and measuring electronics. It can solve problems such as rapid aging and difficulty in online testing of chips, and achieve a high degree of automation.

Pending Publication Date: 2022-02-11
WUHAN OPTICAL VALLEY INFORMATION OPTOELECTRONICS INNOVATION CENT CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0003] In view of this, the embodiment of the present application expects to provide a chip test tool and test system to solve the problem of difficult online testing and rapid aging of chips

Method used

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  • Chip test tool and test system

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Embodiment Construction

[0036] It should be noted that, in the case of no conflict, the embodiments in the application and the technical features in the embodiments can be combined with each other. Undue Limitation of This Application.

[0037] The present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. The descriptions such as “first” and “second” in the embodiments of the present application are only for the purpose of description, and should not be understood as indicating or implying their relative importance or implicitly including at least one feature. In the description of the embodiments of the present application, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0038] In chip testing, such as electronic chips, optoelectronic chips, etc., specifically, in optoelectronic chip testing, wafer-level testing can be tested in large quantities, but most of them are based ...

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PUM

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Abstract

The invention discloses a chip test tool, which comprises an objective table, wherein a positioning part and an alignment mark are formed on the objective table, the positioning part is used for positioning a to-be-tested chip and exposing an optical port of the chip, and the alignment mark is used for performing horizontal position calibration on testing equipment and the chip positioned on the positioning part; and a deflector used for changing the direction of the light beam, so that a coupling optical fiber of the test equipment is coupled with the chip positioned on the positioning part. The invention further discloses a chip test system. According to the chip test tool and test system provided by the invention, wafer-level online test and rapid aging of the chip can be realized, the operation is simple, and the automation degree is high.

Description

technical field [0001] The present application relates to the field of chip testing, in particular to a chip testing tool and testing system. Background technique [0002] At this stage, optoelectronic chips are used as an example for chip testing. On-line testing of optoelectronic chips is often performed on a single chip, and optoelectronic chips involve epitaxy of heterogeneous materials and have early failures, so rapid aging treatment is required for optoelectronic chips. Contents of the invention [0003] In view of this, the embodiment of the present application expects to provide a chip testing tool and testing system to solve the problems of difficult online testing and rapid aging of chips. [0004] In order to achieve the above object, the technical solution of the embodiment of the present application is achieved in this way: [0005] In one aspect of the embodiment of the present application, a chip testing tool is disclosed, including: [0006] An object st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/28
CPCG01R31/2851
Inventor 冯朋肖希王磊熊雨洁高曌
Owner WUHAN OPTICAL VALLEY INFORMATION OPTOELECTRONICS INNOVATION CENT CO LTD
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