Method and system for testing charge collection resistance of germanium-silicon heterojunction bipolar transistor
A heterojunction bipolar, charge-collecting technology for use in microelectronics
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[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in combination with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are exemplary only, and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present invention.
[0028] The existing test technology does not fully consider the defect that the impact on the electrical characteristics of the device after neutron pre-irradiation is carried out. The embodiment of the present invention strengthens the device through neutron pre-irradiation with different fluences, and uses a semiconductor parameter tester Carry out full-parameter measurement, measure the changes in the electrical charac...
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