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Preparation method of corrosion-resistant and hydrophobic micro-nano part

A technology of micro-nano parts, applied in the field of micro-forming manufacturing, can solve the problems of large residual internal stress, poor performance, poor thickness uniformity of micro-nano parts, etc., achieve uniform surface, good hydrophobicity, improve surface uniformity and corrosion resistance performance effect

Active Publication Date: 2022-03-08
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In view of the above deficiencies, the present invention provides a corrosion-resistant and hydrophobic micro-nano parts preparation method, which solves the problems of poor thickness uniformity, large residual internal stress, and poor performance of micro-nano parts.

Method used

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  • Preparation method of corrosion-resistant and hydrophobic micro-nano part
  • Preparation method of corrosion-resistant and hydrophobic micro-nano part
  • Preparation method of corrosion-resistant and hydrophobic micro-nano part

Examples

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Embodiment 1

[0034] This example provides a method for preparing corrosion-resistant and hydrophobic micro-nano parts. For the 400-600 μm thick rubber mold prepared by UV-LIGA, electroforming technology is used to cast a full-glue model cavity to obtain electroformed graphene-nickel micro-nano parts. , and then use electrochemical polishing technology to remove the surface burrs of micro-nano parts, greatly improving its surface accuracy; finally, use heat treatment technology to eliminate the internal force of micro-nano parts, and obtain corrosion-resistant and hydrophobic graphene-nickel micro-nano parts.

[0035] This embodiment provides a rubber mold, which uses photoresist SU-8 to etch to prepare a microstructure adhered to a conductive gold-plated silicon wafer as a rubber mold for electroforming micro parts, with a thickness of 400-600 μm;

[0036] A method for preparing a corrosion-resistant and hydrophobic micro-nano part provided in this embodiment includes the following steps: ...

Embodiment 2

[0047] This example provides a method for preparing corrosion-resistant and hydrophobic micro-nano parts. For the 400-600 μm thick rubber mold prepared by UV-LIGA, electroforming technology is used to cast a full-glue model cavity to obtain electroformed graphene-nickel micro-nano parts. , and then use electrochemical polishing technology to remove the surface burrs of micro-nano parts, greatly improving its surface accuracy; finally, use heat treatment technology to eliminate the internal force of micro-nano parts, and obtain corrosion-resistant and hydrophobic graphene-nickel micro-nano parts.

[0048] This embodiment provides a rubber mold, which uses photoresist SU-8 to etch to prepare a microstructure adhered to a conductive gold-plated silicon wafer as a rubber mold for electroforming micro parts, with a thickness of 400-600 μm;

[0049] A method for preparing a corrosion-resistant and hydrophobic micro-nano part provided in this embodiment includes the following steps: ...

Embodiment 3

[0060] This example provides a method for preparing corrosion-resistant and hydrophobic micro-nano parts. For the 400-600 μm thick rubber mold prepared by UV-LIGA, electroforming technology is used to cast a full-glue model cavity to obtain electroformed graphene-nickel micro-nano parts. , and then use electrochemical polishing technology to remove the surface burrs of micro-nano parts, greatly improving its surface accuracy; finally, use heat treatment technology to eliminate the internal force of micro-nano parts, and obtain corrosion-resistant and hydrophobic graphene-nickel micro-nano parts.

[0061] This embodiment provides a rubber mold, which uses photoresist SU-8 to etch to prepare a microstructure adhered to a conductive gold-plated silicon wafer as a rubber mold for electroforming micro parts, with a thickness of 400-600 μm;

[0062] A method for preparing a corrosion-resistant and hydrophobic micro-nano part provided in this embodiment includes the following steps: ...

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Abstract

The invention discloses a preparation method of a corrosion-resistant and hydrophobic micro-nano part, and belongs to the field of micro-forming manufacturing. In the early stage, the electroforming technology is adopted for preparing the graphene-nickel micro-nano part, then the electrochemical polishing technology is adopted for removing burrs on the surface of the micro-nano part, and the precision of the micro-nano part is greatly improved; and finally, a heat treatment technology is adopted, internal force of the micro-nano part is eliminated, and the corrosion-resistant and hydrophobic graphene-nickel micro-nano part is obtained. The part can effectively prevent corrosion of acid, alkali and salt, the problem that the part can still be continuously used in harsh environments such as high temperature, high pressure and corrosion is solved, and the problems that a casting layer is poor in uniformity, light and the like are solved.

Description

technical field [0001] The disclosure belongs to the field of micro-forming manufacturing, and in particular relates to a method for preparing corrosion-resistant and hydrophobic micro-nano parts. Background technique [0002] Since the emergence of UV-LIGA technology, electroformed nickel has been the main material for manufacturing metal micro parts. However, nickel parts can no longer meet the needs of various fields in terms of mechanical properties and corrosion resistance. Recent studies on nanomaterial composite coatings have found that adding well-dispersed nano-inert ions to the metal matrix can improve the mechanical properties, corrosion resistance, etc. of the material, which also opens up many potential applications of composite materials in MEMS. However, micro-electroforming technology has problems such as poor thickness uniformity of the casting layer, long production cycle, large residual internal stress, defects in the casting layer, and poor performance, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D1/00C25D3/12C25D15/00C25F3/16C21D1/74
CPCC25D1/003C25D1/006C25D3/12C25D15/00C25F3/16C21D1/74
Inventor 王毅索文华刘壮壮王善飞梁翔宇
Owner BEIJING UNIV OF TECH