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Measurement method, manufacturing method, measurement device, and measurement program for surface emitting laser

A technology of surface-emitting lasers and emitting lasers, which is applied in the direction of photometry, lasers, and measuring devices, can solve the problem of time-consuming measurement and achieve the effect of shortening the measurement time

Pending Publication Date: 2022-03-18
SUMITOMO ELECTRIC IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, it takes time to measure light intensity and spectrum in sequence.

Method used

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  • Measurement method, manufacturing method, measurement device, and measurement program for surface emitting laser
  • Measurement method, manufacturing method, measurement device, and measurement program for surface emitting laser
  • Measurement method, manufacturing method, measurement device, and measurement program for surface emitting laser

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Embodiment Construction

[0022] [Description of Embodiments of the Present Disclosure]

[0023] First, the contents of the embodiments of the present disclosure will be listed and described.

[0024] One aspect of the present disclosure is (1) a method for measuring a surface-emitting laser, comprising: a step of causing the surface-emitting laser to emit light; and a step of measuring the light intensity and spectrum of the surface-emitting laser, which includes making In the step of emitting light from the surface-emitting laser, the light emitted from the surface-emitting laser is branched, and one of the branched lights is made to enter the light intensity measurement unit, and the other is made to enter the spectrum measurement unit. Measurement time can be shortened by simultaneously measuring light intensity and spectrum.

[0025] (2) It is possible that the step of making the surface-emitting laser emit light and measuring the light intensity of the surface-emitting laser be performed on the ...

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Abstract

Provided are a measurement method, a manufacturing method, a measurement device, and a measurement program for a surface emitting laser capable of shortening measurement time. This surface-emitting laser measurement method comprises: a step for causing a surface-emitting laser to emit light; and a step for measuring the light intensity and spectrum of the surface-emitting laser, including branching the light emitted from the surface-emitting laser in the step for emitting light from the surface-emitting laser, and causing one of the branched light to enter a light intensity measurement unit and the other light to enter a spectrum measurement unit.

Description

technical field [0001] The present disclosure relates to a measurement method, a manufacturing method, a measurement device, and a measurement program of a surface-emitting laser. Background technique [0002] In the manufacturing process of a surface-emitting laser (Vertical Cavity Surface Emitting Laser, VCSEL: Vertical Cavity Surface Emitting Laser), a plurality of surface-emitting lasers arranged in an array are made to emit light and their characteristics are inspected. There is a technique of inputting electrical signals of different frequencies to a plurality of surface-emitting lasers and analyzing emitted light for each frequency to measure light intensity (for example, Patent Document 1). [0003] prior art literature [0004] patent documents [0005] Patent Document 1: Japanese Patent Laid-Open No. 2010-16110 [0006] Sometimes the light spectrum is also measured together with the light intensity of the surface emitting laser. However, when the measurement of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/42G01M11/02H01S5/00H01S5/42
CPCG01J1/4257G01M11/02H01S5/42H01S5/0014H01S5/0042H01S5/0201H01S5/183H01S5/423
Inventor 久保田良辅
Owner SUMITOMO ELECTRIC IND LTD