Surface acoustic wave resonance device and forming method, filter device and radio frequency front-end device
A resonant device, surface acoustic wave technology, applied in the direction of impedance network, electrical components, etc., can solve the problem that the Q value of the resonator needs to be improved
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[0035] As mentioned in the background art, the Q value of the existing resonator still needs to be improved. The following detailed description is given in conjunction with the accompanying drawings.
[0036] figure 1 is a schematic top-view structure of a SAW resonator, figure 2 Yes figure 1 The schematic diagram of the cross-sectional structure along the direction A1-A2 and the corresponding schematic diagram of the sound velocity distribution.
[0037] Please refer to figure 1 and figure 2 , the SAW resonator includes: a piezoelectric substrate 110, the piezoelectric substrate 110 includes a first bus region VI, a first dummy region I, a first spacer region II, an interdigital region arranged in sequence along the first direction X The overlapping area III, the second spacer area IV, the second dummy area V and the second bus area VII; the electrode layer located on the surface of the piezoelectric substrate 110 , the electrode layer includes: a first bus bar 121 , a...
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