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Control system of semiconductor manufacturing apparatus and control method thereof

A technology for manufacturing equipment and control systems, applied in semiconductor/solid-state device manufacturing, general control systems, control/regulation systems, etc., can solve problems such as product defects, waste of process time, failure paths of wafer transfer robotic arms, etc., to reduce The effect of human error in judgment

Pending Publication Date: 2022-04-22
NAN YA TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Transfer robot failures and path shifts are usually discovered after a large number of wafers are contaminated and scrapped
Using manual inspection and monitoring of the operation of the transfer robot arm usually results in wasted process time and product defects due to human error

Method used

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  • Control system of semiconductor manufacturing apparatus and control method thereof
  • Control system of semiconductor manufacturing apparatus and control method thereof
  • Control system of semiconductor manufacturing apparatus and control method thereof

Examples

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Embodiment Construction

[0139] The following description of the disclosure, accompanied by the accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the disclosure to which, however, the disclosure is not limited. In addition, the following embodiments can be properly integrated to complete another embodiment.

[0140] "An embodiment," "an embodiment," "an exemplary embodiment," "another embodiment," "another embodiment" and the like mean that the embodiments described in the present disclosure may include a particular feature, structure, or characteristic, however Not every embodiment must include the particular feature, structure or characteristic. Also, repeated use of the phrase "in an embodiment" does not necessarily refer to the same embodiment, but could be.

[0141] In order to make the present disclosure fully understandable, the following description provides detailed steps and structures. Obviously, the practice of the pres...

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PUM

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Abstract

The invention provides a control system of semiconductor manufacturing equipment and a control method thereof. The control system includes a sensor unit configured to record a set of data of an operating state of the semiconductor manufacturing apparatus; a sensor interface configured to receive the set of data and generate at least one input signal for a data server; and a control unit. The control unit comprises a diagnosis subsystem which executes an operation state monitoring program to judge whether the semiconductor manufacturing equipment has a fault or not and generate a data signal.

Description

[0001] cross reference [0002] This disclosure claims priority and benefit to U.S. Formal Application No. 17 / 064,365, filed October 6, 2020, the contents of which are hereby incorporated by reference in their entirety. technical field [0003] The present disclosure relates to a control system of manufacturing equipment and a control method thereof. In particular, it relates to a control system of semiconductor manufacturing equipment and a control method thereof. Background technique [0004] The improvement of integrated circuit integration density promotes the rapid growth of the semiconductor industry. Among various manufacturing equipment, semiconductor manufacturing equipment such as a transfer robot constitutes an integral part of the manufacturing process. Failures and path shifts in the transfer robot are usually discovered after a large number of wafers have been contaminated and scrapped. The use of manual inspection and monitoring of the operation of the tra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67276H01L21/67288H01L21/6831H01L21/6875H01L21/67103G08B21/187G05B2219/34427G05B19/4065H01L21/6833
Inventor 林作信陈忠恒李俊德
Owner NAN YA TECH