MEMS optical deflection device
An optical deflection and device technology, applied in optical components, optics, instruments, etc., can solve the problems of poor light reflection performance, reduced scanning range, and reduced reflection efficiency, etc., to achieve high industrial utilization value and improve the effect of scanning range.
Active Publication Date: 2022-04-29
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology
[0005]
In view of the shortcomings of the above-mentioned prior art, the object of the present invention is to provide a MEMS optical deflection device, which is used to solve the problem of reducing the reflection efficiency of light in the MEMS optical deflection device in which the mirror and the driving device are vertically three-dimensionally arranged in the prior art , poor light reflection performance and reduced light scanning range
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[0048] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0049] see Figure 1 to Figure 5 . It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of the present invention, so that only the components related to the present invention are shown in the diagrams rather than the number, shape and Dimensional drawing, the type, quantity and proportion of each component may be changed according to actual needs during actual implement...
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The invention provides an MEMS optical deflection device which comprises a base, 2N cantilever beam actuators, 2N coupling structures and a reflection micromirror, and N is larger than or equal to 1. Each cantilever beam actuator comprises an actuator substrate, an actuating structure and a first flexible structure; the base is fixedly connected with the actuator substrate; the actuating structure is connected with the actuator substrate; the first flexible structure is fixedly connected with the actuator substrate; the first flexible structure is fixedly connected with one coupling structure; the 2N coupling structures are fixedly connected below the reflecting micromirror; the 2N cantilever beam actuators are distributed on the periphery of the lower portion of the reflection micromirror in the circumferential direction, and every two cantilever beam actuators are distributed in a straight line. One coupling structure is arranged at one end of each first flexible structure, so that when the two cantilever beam actuators distributed along a straight line generate actuating force at the same time to enable the reflecting micromirror to rotate, the rotating shafts of the two cantilever beam actuators are coaxial with the reflecting micromirror, and an incidence point of light does not deviate in the deflection process.
Description
technical field [0001] The invention relates to the technical field of micro-electromechanical systems, in particular to a MEMS optical deflection device. Background technique [0002] In the field of optical transmission, by adjusting the propagation direction of the optical path, a series of functions such as optical switch, optical cross interconnection and beam scanning can be realized. Usually, the reflective mirror is arranged on the driving device, so as to drive the reflective mirror to move through the driving device, so as to change the transmission direction of the outgoing light reflected by the reflective mirror, and realize the change of the propagation direction of the optical path. [0003] In order to realize the miniaturization of the device composed of the driving device and the reflector, so that the device can be used in the application scene with strict requirements on the volume of the device, the Micro-Electro-Mechanical System technology (MEMS, Micro...
Claims
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Login to View More IPC IPC(8): G02B26/10G02B26/08
CPCG02B26/10G02B26/0833
Inventor 武震宇王栎皓刘艺晨汪洋余子昊
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI