Acid supply device and wet etching system
A technology for supplying and storing acid, which is applied in control/regulation systems, liquid level control, alarms, etc., and can solve problems such as product out-of-stock, false alarms on the liquid level of acid storage containers, etc.
Active Publication Date: 2022-05-06
GUANGZHOU CANSEMI TECH INC
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[0007] The purpose of the present invention is to provide an acid supply device and a wet etching system to solve the problem of false alarm of the liquid level of the acid storage container and the risk of product running out
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[0029] In order to make the purpose, advantages and features of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in very simplified form and not drawn to scale, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In addition, the structures shown in the drawings are often a part of the actual structures. In particular, each drawing needs to display different emphases, and sometimes uses different scales.
[0030] As used in the present invention, the singular forms "a", "an" and "the" include plural objects, the term "or" is usually used in the sense of including "and / or", and the term "several" Usually, the term "at least one" is used in the meaning of "at least one", and the term "at least two" is usually used in the meaning of "two or more". In ...
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The invention provides an acid supply device and a wet etching system. The device comprises an acid storage container, a gas pipeline, a valve assembly, a liquid level sensor and a control module, the acid storage container is provided with a first liquid level area along the vertical direction; the gas pipeline extends into the acid storage container and is close to the side wall of the acid storage container; the valve assembly is used for opening or closing the gas pipeline; the liquid level sensor is used for outputting a primary alarm signal when detecting that liquid exists in the first liquid level area of the acid storage container; the control module is used for recording the receiving times of the alarm signal; and when the control module records that the receiving frequency of the alarm signal is smaller than or equal to a preset value, the valve assembly opens the gas pipeline according to preset duration. Thus, when acid liquor is attached to the first liquid level area, the control module drives the valve assembly to open the gas pipeline according to the number of times of the alarm signals, the nitrogen blows the acid liquor attached to the side wall of the acid storage container to fall down, it is guaranteed that the acid liquor is not attached to the first liquid level area, then the alarm signals of the liquid level sensor are removed, and false alarm is avoided.
Description
technical field [0001] The invention relates to the technical field of semiconductors, in particular to an acid supply device and a wet etching system. Background technique [0002] In the wet etching system, because the performance of the DNS machine is relatively good, and can basically meet the process requirements above 14nm, so now the front-end process of the domestic wafer manufacturing plant basically uses the DNS machine. Considering the wet etching Different acids are used in the etching system process. In order to meet the process requirements and improve the utilization rate of the machine, it is usually equipped with a disposable acid tank. The disposable acid tank can run different acids according to the process requirements. In addition, the storage The acid container is mainly used as a device for storing acid during the operation of the disposable acid tank. When the machine runs out of stock, the factory acid is supplied to the acid storage container first...
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IPC IPC(8): H01L21/67G05D9/12G08B21/18
CPCH01L21/67075H01L21/67276G05D9/12G08B21/18
Inventor 欧志文唐斌林庆松朱红波张志敏
Owner GUANGZHOU CANSEMI TECH INC