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Pressure detector based on phase change material

A phase change material and detector technology, which is applied to the measurement of the property force of piezoelectric resistance materials, etc., can solve the problems of low pressure detection sensitivity, damage to the sensing material, and narrow pressure measurement range, and achieve good application prospects, Simple equipment, high sensitivity effect

Inactive Publication Date: 2022-05-17
金华伏安光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For the pressure sensor that depends on the change of the contact area, a large pressure is required to change the contact state, and the sensitivity of pressure detection is low
For a pressure sensor based on the carrier concentration of a semiconductor or a two-dimensional material, if the sensing material is not suspended in the air, a larger pressure is required to change the conductivity characteristics more; if the sensing material is suspended in the air, it is easy to damage the sensing material , has a higher limit on the pressure measurement range, or the pressure measurement range is narrower

Method used

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  • Pressure detector based on phase change material
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Embodiment 1

[0020] The present invention provides a pressure detector based on phase change materials, such as figure 1 As shown, it includes a substrate 1 , a first electrode 2 , a second electrode 3 , a phase change material particle-polyethylene glycol mixture 4 , and a force receiving part 5 . The surface of the substrate 1 is provided with grooves. The material of the base 1 is an insulating material. Specifically, the material of the substrate 1 is silicon dioxide. Substrate 1 may also consist of silicon nitride, hafnium oxide, zirconium oxide, aluminum oxide, aluminum nitride or boron nitride or combinations thereof. The groove is in the shape of a cuboid. The first electrode 2 and the second electrode 3 are respectively attached and fixed on opposite sides of the groove, that is to say, the first electrode 2 and the second electrode 3 are not in contact. The material of the first electrode 2 and the second electrode 3 is gold or silver or platinum. The phase change material p...

Embodiment 2

[0025] On the basis of Example 1, such as figure 2 As shown, at the bottom of the groove, the distance between the first electrode 2 and the second electrode 3 is short; at the top of the groove, the distance between the first electrode 2 and the second electrode 3 is long. That is, at the bottom of the groove, the distance between the two electrodes is narrow; at the top of the groove, the distance between the two electrodes is wide. In this way, when the force receiving part 5 moves downward at the wide position, at the narrow position, the distance between adjacent phase change material particles changes more, thereby changing the phase change material particle-polyethylene The conductive properties of the alcohol mixture allow for higher sensitivity pressure detection.

[0026] Furthermore, the phase change material particles have different sizes, and the small size phase change material particles are uniformly doped in the large size phase change particles. In this way...

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Abstract

The invention relates to the field of pressure detection, and particularly provides a pressure detector based on a phase-change material, the surface of a substrate is provided with a cuboid-shaped groove, a first electrode and a second electrode are respectively attached to opposite side surfaces of the groove, a phase-change material particle-polyethylene glycol mixture is arranged in the groove, and the phase-change material particle-polyethylene glycol mixture is arranged in the groove. The phase change material particle-polyethylene glycol mixture does not fill the groove, and the stress part is partially embedded into a gap between the first electrode and the second electrode. During application, to-be-measured pressure acts on the stress part, the conductive characteristic of the phase change material particle-polyethylene glycol mixture is measured through the first electrode and the second electrode, and the to-be-measured pressure is determined through the change of the conductive characteristic of the phase change material particle-polyethylene glycol mixture. The pressure sensor has the advantage of high pressure detection sensitivity.

Description

technical field [0001] The invention relates to the field of pressure detection, in particular to a pressure detector based on phase change materials. Background technique [0002] Pressure is an important parameter for engineering status monitoring and safety assessment, and the detector used for pressure measurement is one of the common detectors in engineering. [0003] Conventional electrical pressure sensors are realized by changing the contact area of ​​conductive samples and changing the conductive properties of semiconductors or two-dimensional materials through pressure. For example, the invention patent CN103378082B provides a graphene pressure sensor, the graphene film is suspended on the open cavity formed in the semiconductor substrate, and the suspended graphene film is used as a movable electromechanical film for sensing pressure, in order to improve In order to improve the sensitivity and reliability of the sensor device, the inventors also set the graphene ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18
CPCG01L1/18
Inventor 张中侠
Owner 金华伏安光电科技有限公司