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Piezoelectric ceramic chip preparation method, piezoelectric ceramic chip assembly and display device

A piezoelectric ceramic and chip technology, applied in the field of piezoelectric ceramic chip components, display devices, and piezoelectric ceramic chip preparation, can solve the problems of inaccurate tactile sense, low yield, failure, etc., so as to reduce chip damage and improve The effect of product yield

Pending Publication Date: 2022-05-20
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to process limitations, the current integration yield of piezoelectric ceramic chips and display panels is low, resulting in inaccurate or even invalid tactile sensations

Method used

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  • Piezoelectric ceramic chip preparation method, piezoelectric ceramic chip assembly and display device
  • Piezoelectric ceramic chip preparation method, piezoelectric ceramic chip assembly and display device
  • Piezoelectric ceramic chip preparation method, piezoelectric ceramic chip assembly and display device

Examples

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Embodiment Construction

[0062] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.

[0063] In the related art, a piezoelectric ceramic chip generally includes a piezoelectric ceramic layer 12 , and a top electrode 13 and a bottom electrode 11 respectively disposed on both sides of the piezoelectric ceramic layer 12 . When preparing the piezoelectric ceramic chip, first grow the piezoelectric ceramic layer 12 on the gem substrate 200, refer to figure 1 , and then form the bottom electrode 11 on the piezoelect...

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PUM

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Abstract

The invention provides a preparation method of a piezoelectric ceramic chip, a piezoelectric ceramic chip assembly and a display device. The preparation method comprises the steps that a piezoelectric ceramic layer formed on a substrate and a bottom electrode covering the piezoelectric ceramic layer are transferred to a base plate, an insulating layer with an opening is formed on the base plate so that the insulating layer can cover the piezoelectric ceramic layer and the edge of the bottom electrode, and the opening can expose the piezoelectric ceramic layer; immersing the substrate in the etching solution of the bottom electrode material for etching; and forming a top electrode in the opening of the insulating layer, so that a gap is formed between the top electrode and the insulating layer. According to the preparation method disclosed by the invention, the chip which fails to bind the piezoelectric ceramic layer can be ensured not to be short-circuited, the chip is prevented from being damaged, the successfully bound chip can form a complete chip structure, and a good tactile representation technology is ensured to be realized.

Description

technical field [0001] The invention relates to the field of chip technology, in particular to a preparation method of a piezoelectric ceramic chip, a piezoelectric ceramic chip component and a display device. Background technique [0002] As an emerging human-computer interaction technology, surface tactile reproduction technology can perceive the characteristics of objects by touching the screen with bare fingers, and realize efficient and natural interaction on multimedia terminals, which has great research value. [0003] The surface tactile reproduction technology based on friction control can realize fine and continuous texture tactile reproduction. Piezoelectric ceramics is a material that realizes surface tactile reproduction technology based on friction control. When an electric field is applied to the polarization direction of piezoelectric ceramics, piezoelectric ceramics will produce mechanical deformation in a certain direction, forming a certain friction force,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/27H01L41/29H01L41/31H01L41/113H01L27/20G06F3/01G06F3/041H10N30/05H10N30/067H10N30/06H10N30/07H10N30/082H10N30/30H10N39/00
CPCG06F3/016G06F3/0412H10N39/00H10N30/30H10N30/07H10N30/05H10N30/06H10N30/072H10N30/067H10N30/082
Inventor 陈右儒
Owner BOE TECH GRP CO LTD