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Gas nozzle cleaning method and system

A cleaning system and cleaning technology, applied in the field of cleaning systems, can solve problems such as fracture, hindering the expected purpose of cleaning components, and damage to cleaning components

Pending Publication Date: 2022-05-27
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Furthermore, it has been found that the cleaning member itself becomes damaged during use of the cleaning mechanism
The cleaning member has cracked, sometimes to the extent that parts of the cleaning member have been completely broken, which prevents the cleaning member from performing its intended purpose

Method used

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  • Gas nozzle cleaning method and system
  • Gas nozzle cleaning method and system
  • Gas nozzle cleaning method and system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0046] As shown in Figure 1, a nozzle structure (1) and a cleaning member (2) according to the prior art are shown. The nozzle structure (1) has a nozzle (3). The nozzle (3) has a central conduit configured to be placed on the cleaning member (2) so that the nozzle (3) acts as a sleeve around the cleaning member (2).

[0047] The cleaning member (2) comprises a substantially helical spring (4). The substantially helical spring (4) may also be referred to as a "cleaning spring". The spray gun (5) is positioned coaxially with the cleaning spring (4) so ​​that the cleaning spring (4) surrounds the spray gun (5). In use, the gas travels through the lance (5) and exits the distal end of the lance (6) for combustion.

[0048] At the first end, the cleaning spring (4) is coupled to an actuator (not shown) which provides the cleaning spring (4) in the axial direction of the nozzle (3) between the first and second positions back-and-forth shift. In Figure 1 the cleaning spring (4)...

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PUM

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Abstract

A system and method for cleaning gas flowing through an inlet nozzle of an abatement combustor combustion chamber. The abatement combustor intermittently receives gas for combustion from the supply process. The nozzle includes a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position in which the cleaning member is located outside the path of the flame associated with the nozzle to a second cleaning position in which the cleaning member is located in the path of the flame associated with the nozzle. The method comprises the following steps: a. Identifying when the nozzle is stopped in use; b. Moving the cleaning member from the first position to the second position when the nozzle is deactivated; and c. Returning the cleaning member to the first position prior to using the nozzle.

Description

technical field [0001] The present invention relates to a cleaning system for a gas abatement system, a gas abatement burner, and a method for cleaning a gas inlet nozzle of an abatement burner. Background technique [0002] Abatement burners are used to treat exhaust gases from, for example, semiconductor manufacturing processes. This treatment is important because exhaust gas can be toxic and / or harmful to the atmosphere due to its high greenhouse effect. [0003] One such exhaust gas treatment method involves combustion to remove harmful compounds from the gas stream. Typically, the exhaust gas is mixed with fuel gas, which is delivered to the combustion chamber via an inlet assembly for combustion. The inlet assembly typically includes a nozzle structure through which the gas mixture is delivered. The gas mixture burns as it leaves the nozzle structure. [0004] The inlet assembly also typically includes a cleaning mechanism for removing solid deposits of the process...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F23D14/50
CPCF23D14/50F23G7/065F23G2209/142F23G2204/103F23K5/007F23K2900/05003B08B1/00F23D11/38F23D11/386F23G7/00F23G7/06B08B1/165F23G5/44
Inventor G·D·斯坦顿
Owner EDWARDS LTD