Gas pressure sensor, preparation method thereof and gas pressure detection method

Abstract

The invention discloses a gas pressure sensor, a preparation method thereof and a gas pressure detection method. The gas pressure sensor comprises a substrate, an insulating layer, a two-dimensional material layer and two electrodes, the insulating layer is stacked on the substrate, a groove is formed in the insulating layer, the two electrodes are arranged on the side, away from the substrate, of the insulating layer and located on the two sides of the groove respectively, the two-dimensional material layer is suspended above the groove, and the two ends of the two-dimensional material layer are connected with the two electrodes respectively. The two-dimensional material layer is configured with a first bias voltage through the two electrodes, and a second bias voltage is configured between the substrate and any electrode. When the device is exposed in a gas environment, the upper surface and the lower surface of the suspended two-dimensional material adsorb gas molecules, so that the conductivity is influenced; the conductivity of the device under different air pressures can be obtained by configuring two bias voltages, and then the ambient air pressure is reflected. The gas pressure intensity sensor is of an on-chip integrated structure and has the advantages of being miniature, low in power consumption, wide in measuring range and simple in structure.

Description

technical field [0001] The invention belongs to the technical field of sensors, and more particularly, relates to a gas pressure sensor, a preparation method thereof, and a gas pressure detection method. Background technique [0002] Gas pressure sensors are the core components for gas pressure measurement, and are widely used in electronic information equipment, aerospace equipment, and surface science analysis equipment. Miniaturization, high precision, ultra-low power consumption, high reliability, and wide range are the development trends of barometric pressure measurement devices and equipment; especially in special application fields such as deep space exploration and near space exploration, as well as gyroscopes, micro-accelerometers, etc. In vacuum-packaged MEMS devices, the constraints of volume, power consumption and reliability on air pressure measurement devices are more obvious. The gas pressure sensor developed by micro-nano processing technology has the advan...

AI Technical Summary

Problems solved by technology

Currently commonly used thermal resistance, capacitive film and ionization gas pressure sensors are limited in the process of miniaturization and integration

For example, the miniaturization of the thermal resistance air pressure sensor and the capacitive film air pressure sensor will reduce the effective area of ​​the sensing functional unit (respectively, the hot wire and the capacitive film), resulting in a sharp drop in measurement accuracy and measurement range

Reducing the volume of the ionization air pressure sensor will reduce the probability of electrons colliding with the gas, which will lead to the inability to realize air pressure detection

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