Straight plate type practical radio frequency MEMS switch

Abstract

A straight plate type practical radio frequency MEMS switch is mainly composed of a substrate, a microwave transmission line, a driving electrode, a lower electrode, a contact, an upper electrode, a fixed anchor point, an air bridge and a release hole, the microwave transmission line, the driving electrode and the lower electrode are arranged on the substrate, the driving electrode is located below the upper electrode, the upper electrode is of a straight plate type structure, a hole is formed in the upper electrode, and the contact is located in the hole. By adopting the straight plate type upper electrode structure, the microwave switch has the advantages of simplicity, practicability and convenience in impedance matching, is easy to implement in process processing, is suitable for batch production, improves the yield of the switch, reduces the cost of the switch, and is suitable for popularization and application in the field of microwave devices, such as microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices, microwave devices and the like. In addition, a single-contact structure is adopted, the reliability problem caused by double-contact virtual connection can be effectively solved, the switch contact characteristic is enhanced, weak contact is reduced, switch ablation and adhesion are avoided, and the service life of the switch is greatly prolonged.

Description

[0001] This application is a divisional application for the invention patent titled "A Practical Radio Frequency MEMS Switch of a Straight Plate Type"; the application number of the parent application is: CN201710605260.5; the application date of the parent application is: 2017.07.24. technical field [0002] The invention belongs to the technical field of radio frequency MEMS, and in particular relates to a bar type practical radio frequency MEMS switch. Background technique [0003] RF MEMS switches have the advantages of low insertion loss, low power consumption, low cost, and high linearity. They can be used in reconfigurable circuits, including attenuators, phase shifters, filters, and antennas, as well as in substations. The system includes signal path selection, transmit / receive (T / R) components, and beamforming antenna arrays. RF MEMS switches can greatly reduce the size, weight and cost of reconfigurable systems, and become an indispensable and important technology ...

AI Technical Summary

Problems solved by technology

However, the upper electrode structure of these two switches is relatively complicated, and the process is difficult to process, which is easy to reduce the yield of the switch

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