Heater assembly and single crystal furnace
A heater and single crystal furnace technology, applied in the direction of single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve problems such as low efficiency and achieve the effect of improving efficiency
Pending Publication Date: 2022-08-09
XIAN ESWIN MATERIAL TECH CO LTD
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Problems solved by technology
[0003] In order to solve the above technical problems, the present invention provides a heater assembly and a single crystal furnace to solve the problem of low efficiency of indirect heating
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[0021] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are some, but not all, embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art fall within the protection scope of the present invention.
[0022] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing t...
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Abstract
The invention relates to a heater assembly and a single crystal furnace, the single crystal furnace comprises a furnace body, a crucible is arranged in the furnace body, the bottom of the crucible is supported by a supporting structure, the supporting structure comprises a supporting shaft, the crucible can be driven by the supporting shaft to rotate, and the crucible is arranged in the furnace body. The heater assembly comprises a heating part wrapping the outer surface of the crucible, the heating part can rotate synchronously with the crucible, and the heating part comprises a plurality of connecting electrodes; the conductive part is arranged on the supporting shaft and comprises a plurality of annular conductive parts and external electrodes, the annular conductive parts are connected with the connecting electrodes in a one-to-one correspondence mode, the external electrodes are connected with the annular conductive parts in a one-to-one correspondence mode, the connecting electrodes can rotate along the annular conductive parts, and the external electrodes are connected with an external power source.
Description
technical field [0001] The invention relates to the technical field of silicon product manufacturing, in particular to a heater assembly and a single crystal furnace. Background technique [0002] The production of single crystal silicon by the Czochralski method is currently the most important method for preparing single crystal silicon. The thermal field system is one of the most important conditions for the crystallization of silicon materials. The temperature gradient distribution of the thermal field directly affects whether the single crystal can be pulled out smoothly. Crystal and control the quality of single crystal, especially in the process of growing single crystal silicon material by Czochralski single crystal furnace, graphite thermal field is usually used to provide growth temperature, gradient control, etc. In the specific process, the polycrystalline raw material is melted in a low vacuum accompanied by an inert gas environment, and the single crystal materi...
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IPC IPC(8): C30B15/14C30B15/10C30B29/06
CPCC30B15/14C30B15/10C30B29/06C30B15/30
Inventor 毛勤虎
Owner XIAN ESWIN MATERIAL TECH CO LTD