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Design and structure of planar light waveguide polarizer

A planar optical waveguide and polarizer technology, applied in the coupling of optical waveguides, polarizing elements, etc., can solve problems such as impracticality, and achieve the effects of high extinction ratio, simple process, and excellent transmission characteristics.

Inactive Publication Date: 2004-07-14
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

so they are not really practical in integrated optics

Method used

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  • Design and structure of planar light waveguide polarizer
  • Design and structure of planar light waveguide polarizer
  • Design and structure of planar light waveguide polarizer

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] According to the aforementioned method, the period of the high-reflection film is taken as 3, and the working wavelength λ0 is 1.3 μm. Polycrystalline Si (0.11 μm) / amorphous SiO2 (0.25 μm) is prepared on a clean silicon substrate by double target wheel sputtering technology. , the thickness of the middle core layer is 1.16 μm, and the number of periods is 8. The optical waveguide polarizer with this structure has good transmission characteristics and high extinction ratio through computer simulation and experiments.

Embodiment 2

[0030] The period of the high reflection film is taken as 18, and the working wavelength λ0 is 1.55 μm. Polycrystalline Si (0.131 μm) / amorphous SiO 2 (0.30μm), middle core layer thickness 1.38μm, polycrystalline Si / amorphous SiO 2 The repetition period is 18. After testing, the polarizer with this structure has also obtained satisfactory results.

Embodiment 3

[0032] The period of the high reflection film is taken as 18, and the working wavelength λ0 is 5.0 μm. Polycrystalline Si (0.4μm) / amorphous SiO was prepared 2 (1.0 μm), the thickness of the core layer is 4.5 μm, and the number of repetition cycles is 10, and a waveguide polarizer with good performance is also obtained.

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Abstract

A new tye of planar optical waveguides polarimeter is designed based on theory of photon crystal. The invented polarimeter is made by producing total same two sets of multilayer film of polycrystal Si / amorphous SiO2 on a silicon substrate with a layer of amorphous SiO2 sandwich layer. Since the light with different polarization states has different transmissions of waveguides notable, so natural light will get high extinction ratio and very low transmission loss in passing a very short transmission distance. Both theroretical analysis and experimental result show that the preparation of the ivnented polarimeter is simple and the technique is compatible so silicon planar integration technique.

Description

technical field [0001] The invention relates to the design and structure of a new type of optical communication technology basic device - planar optical waveguide polarizer. Background technique [0002] With the rapid development of information and communication technology, optical waveguide polarizers are valued because of their simple structure and easy integration. The waveguide polarizers that have been reported so far include: traditional metal-clad waveguide polarizers, waveguide polarizers using birefringent materials as the core or cladding, and waveguide polarizers constructed using asymmetric multilayer films. Among them, the transmission loss of metal-clad waveguide polarizers is relatively large, and waveguide polarizers made of birefringent materials and waveguide polarizers constructed of asymmetric multilayer films require a long transmission distance to obtain a comparable extinction ratio. So they are not really practical in integrated optics. Contents o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/30G02B6/27
Inventor 施斌赵登涛樊永良王迅
Owner FUDAN UNIV