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Manufacturing method of micro-pipeline

A manufacturing method and technology of micro-pipes, which are applied in the field of micro-mechanical processing, can solve the problems of difficult process, unfavorable processing technology, and large surface roughness of micro-pipes, so as to achieve simple and easy-to-operate process, meet performance requirements, and overcome processing problems. difficult effect

Inactive Publication Date: 2005-02-02
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These two methods are only suitable for silicon materials, and the micropipe pattern obtained by etching is subject to certain restrictions; and, in the bonding technology, the bonding of the pattern needs to be precisely aligned, and the process is difficult; in the buried technology, the process Complicated; these have brought adverse effects on the processing of microchannels
In addition, the morphology of micropipes is not easy to detect, which is not conducive to the improvement of processing technology; the surface roughness of the processed micropipes is also large, which has a great influence on the flow of fluid

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0030] Below in conjunction with embodiment the concrete manufacturing process of micropipe is further described:

[0031] 1. Fabrication of a simple planar hydrophilic microchannel with a height of 5 μm

[0032] 1) Fabrication of Micropipe Pattern Mask

[0033] The pattern of micro-pipes to be processed is made into a common mask by pattern generator. Alternatively, suitable masks can also be purchased directly.

[0034] 2) Fabrication of micro-pipe inlet and outlet

[0035] Take a piece of glass with a thickness of 2mm as the substrate, reserve a 4mm square entrance and exit pattern at a suitable position, cover the rest with acid-resistant silica gel, and then etch it with hydrofluoric acid (HF) acid etching method. The import and export patterns are transferred to the glass substrate. When the etching reaches the other side of the substrate and a through hole is formed, stop etching, wash with deionized water, and then peel off the silica gel to obtain the import and ex...

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Abstract

A process for preparing microtube features that the microtube pattern prepared on positive photoresist by photoetching technique is crosslinked by negative photoresist for direct fixing and packaging. Its advantages are smooth surface, simple process, and high transparency of microtube.

Description

Technical field: [0001] The invention relates to the processing technology of micro-machines, especially the method for making micro-pipes therein. Background technique: [0002] MEMS is a multidisciplinary high-tech, which opens up new fields for the development of various disciplines. Microfluidics is an indispensable part in the research of microelectromechanical systems, and microchannels are one of the important components of microfluidic systems. [0003] At present, the processing of micropipes mainly adopts silicon etching process. Among them, ① can be processed by bonding technology: first obtain the photoresist pattern of the micropipe on the two silicon wafers, and then use the etching method to transfer the micropipe pattern to the silicon wafer. Silicon chip bonding of micro-channel patterns, to obtain packaged micro-channels (see: Etchingtechnology for microchannels, Proc. IEEE MEMS Workshop, 1997, p147-152). ② It can also be processed by burying technology:...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00
Inventor 刘刚田扬超洪义麟张新夷阚娅
Owner UNIV OF SCI & TECH OF CHINA