Nano sized intelligent driving unit for super precisively machining
A technology of ultra-precision machining and driving components, which is applied in the direction of metal processing machinery parts, metal processing, metal processing equipment, etc., to achieve the effect of increasing the feed range, preventing stress concentration, and ensuring accuracy
Inactive Publication Date: 2005-05-18
ZHEJIANG UNIV
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Problems solved by technology
At present, the traditional method to solve the error caused by thermal displacement is passive elimination or passive compensation. Instead of passive compensation after thermal displacement is generated, it is better to use thermal displacement as active feed
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[0015] The key point of the present invention is to use each piece of deformation body with intelligent structure as the actuator, and according to the principle of thermal expansion and contraction, by controlling the internal heat source with mesh structure in each piece of deformation body, the temperature field is changed, and then the displacement is controlled. purpose of the field. Since the thermal displacement of the feed surface of the nanoscale displacement drives the component directly as the active feed, the research on thermal deformation has shifted from passive compensation to active application. figure 2 Among them, the nano-scale displacement intelligent driving part with large feed force is composed of various deformation bodies in series in structure, and the purpose is to expand the feed range as much as possible without changing the feed resolution. In order to facilitate the control and prevent mutual heat conduction between the deformed bodies and betw...
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The invention discloses a nanoscale displacement intelligent driving component with large feed force for ultra-precision machining. It is composed of multiple deformation bodies and heat insulators connected in series, and each deformation body adopts a network structure. Advantages of the present invention: 1) Adopting a symmetrical intelligent structure enables the nano-scale displacement driving part to realize the functions of self-checking, self-adaptation and self-learning; 2) The intelligent structure can ensure the flatness of the feeding surface of the nano-scale displacement driving part, In this way, the stress concentration phenomenon in the feeding process can be effectively prevented, and each deformed body and each layer of each piece of the nanoscale displacement driving part adopts the same material and the same process, and the thermal expansion coefficient can be eliminated after the integrated production. Stress concentration caused by mismatch; 3) The intelligent drive component is composed of multiple deformable bodies, and the structure adopts a series connection between deformable bodies and heat insulators, thereby increasing the feed range under the premise of ensuring accuracy; 4) Intelligent drive is required The part realizes the function of large feed force, and the dynamic response time is reduced in the design, so this part is not suitable for high-frequency feed occasions.
Description
technical field [0001] The invention relates to a nanoscale displacement intelligent driving component with large feed force for ultra-precision machining. Background technique [0002] The research on micro / nano-scale driving components mainly focuses on the following two aspects: one is the research on nano-scale driving components with small feed force. With the rapid development of nanoscale technology in the 1980s, the research on nanoscale actuators with small feed force has entered a climax. At present, piezoelectric ceramic actuators, which are most widely used in the field of micro-displacement feeding, have been greatly developed because of their successful application in scanning tunneling microscopes and various scanning probe microscopy (SPM). This type of driver technology is becoming mature, but because the driving force is too small, for example, the maximum pressure that the domestic piezoelectric ceramic driver can withstand is ...
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IPC IPC(8): B23Q1/34B23Q5/00F03G7/06
Inventor 胡旭晓
Owner ZHEJIANG UNIV