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Wafer carrier with stacking adaptor plate

A technology of adapters and wafer containers, which is applied in the field of carriers, can solve problems such as danger and non-stacking of wafer carriers, and achieve the effect of saving factory space

Inactive Publication Date: 2005-09-07
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The mechanical interface on the bottom of the 300mm wafer container provides a very stable positioning mechanism when the container is connected to processing equipment equipped with kinematic couplings, however, stacking such wafer containers one on top of the other has hitherto been accompanied by dangerous, and generally such wafer handlers cannot be stacked
The assembly of the modules with the fasteners can cause this rubbing and scratching

Method used

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  • Wafer carrier with stacking adaptor plate
  • Wafer carrier with stacking adaptor plate
  • Wafer carrier with stacking adaptor plate

Examples

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Embodiment Construction

[0020] For this mechanical interface, figure 1 A prior art wafer container 30 is shown. The carrier includes container portion 32 , door 34 , and robot flange 36 , and handle 44 . The wafer handler has a plurality of horizontal wafer slots formed by pairs of wafer racks positioned within the container portion. figure 2 Another type of wafer container is shown, similarly also having a container portion 32, a handle 33, and also showing a mechanical interface 48 configured as a first configuration of the kinematic coupler. The kinematic coupling has three grooves 49 as described in US Pat. These patents are hereby incorporated by reference. Motion couplings have proven to be effective mechanical interfaces and are the industry standard for 300mm wafer handlers. The kinematic coupler has mating parts, one part having three protrusions, such as a part-sphere positioned at the three vertices of an equilateral triangle, and the other part having three grooves accommodating the ...

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Abstract

A front opening wafer container has a container portion with a transparent shell and a door to close the open front. The container portion has a machine interface on the bottom of the shell, such as a kinematic coupling, and a receptacle at the top of the shell to receive an accessories, in particular a robotic lifting flange or an adaptor plate. The adaptor plate will ideally have a cooperating machine interface portions to allow stacking of the wafer carriers. The receptacle has, in preferred embodiments, sliding support guides with undercut portions for retention of the robotic lifting flange or the adaptor plate. The accessory will ideally have a detent positioned on the accessories to releasably lock said accessory in place on the container portion.

Description

[0001] This application claims priority to provisional application 60 / 251025, filed December 4, 2000, which is hereby incorporated by reference. technical field [0002] The present application relates to handlers for semiconductor wafers, and more particularly to a closeable container for storing and transporting wafers. Background technique [0003] In the semiconductor processing industry, sealable enclosures commonly referred to as transport modules have been utilized for many years to store and transport wafers between processing steps and / or between various pieces of equipment. Semiconductor substrates are notoriously susceptible to damage from contaminants such as particles. Special measures are taken to eliminate contamination in clean rooms and other environments where wafers are stored and processed into circuits. [0004] For wafers in the 200mm range or smaller, containers known as SMIF boxes (Standardized Mechanical Interface) have been utilized to provide a cl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65D21/02B65D85/86H01L21/673
CPCH01L21/67379H01L21/68
Inventor 菲尔·格林
Owner ENTEGRIS INC