AOI Imaging System Based on TDI Linear Scan Camera

The AOI imaging system with dual illumination optical paths and dual image acquisition channels solves the problem that existing technologies can only output one type of illumination effect, achieving efficient, high-speed, and high signal-to-noise ratio defect detection, thus improving detection efficiency and capability.

CN122093668APending Publication Date: 2026-05-26CHENGDU CNS VISION TECH CO LTD
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Patent Information

Application Number
CN202610213141.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-02-13
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing AOI imaging systems based on TDI line scan cameras can only output images with one lighting effect in a single scan, resulting in poor defect detection capabilities and difficulty in detecting some important defects.

Method used

An AOI imaging system employing dual illumination optical paths and dual image acquisition channels achieves two illumination effects in a single scan by setting up a first illumination optical path and a second illumination optical path with different illumination effects, and by controlling the first TDI linear array acquisition channel and the second TDI linear array acquisition channel to periodically alternate exposure and lighting up the first illumination optical path and the second illumination optical path periodically alternate.

Benefits of technology

While achieving high-quality imaging, it simplifies the system structure, improves defect detection efficiency, and can detect important defects that are difficult to detect based on a single lighting effect, thus improving defect detection capabilities.

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Abstract

This disclosure provides an AOI imaging system based on a TDI line scan camera for image acquisition of a display panel under inspection, relating to the field of display manufacturing. The system includes a TDI line scan camera, an illumination system, and a control system. The TDI line scan camera includes a first TDI line scan acquisition channel and a second TDI line scan acquisition channel. The illumination system includes a first illumination optical path and a second illumination optical path with different illumination effects. The control system is configured to: respond to an image acquisition trigger signal received by the AOI imaging system, control the first TDI line scan acquisition channel and the second TDI line scan acquisition channel to periodically alternate exposure, while simultaneously controlling the first illumination optical path and the second illumination optical path to periodically alternate illumination; and the first illumination optical path is illuminated simultaneously with the exposure of the first TDI line scan acquisition channel, and the second illumination optical path is illuminated simultaneously with the exposure of the second TDI line scan acquisition channel, so as to achieve the output of two illumination effects of the display panel under inspection in a single scan.
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