A liquid level balancing device and dual temperature control system

Abstract

The application discloses a liquid level balancing device and a double-temperature control system. The liquid level balancing device comprises a first liquid storage tank, a second liquid storage tank and a liquid level balancing pipe. The first liquid storage tank and the second liquid storage tank are respectively used for storing mediums of a first temperature control circulating loop and a second temperature control circulating loop. The inside of the first liquid storage tank is divided into a first operation area and a first buffer area by a first partition plate; the inside of the second liquid storage tank is divided into a second operation area and a second buffer area by a second partition plate. The two ends of the liquid level balancing pipe are respectively communicated with the first buffer area and the second buffer area. Compared with the related art, the liquid level balancing device disclosed by the application physically greatly limits the convection mixing and heat conduction between the working mediums of the two temperature control circulating loops by dividing the inside of the liquid storage tank, and effectively reduces the risk of heat cross talk. The automatic balancing of the pressure and the overall liquid level between the two temperature control loops is realized through the liquid level balancing pipe, the thermal expansion and cold contraction and the trace leakage are compensated, and the system stability is high.

Description

Technical Field

[0001] This application relates to the field of heating and cooling equipment technology, and more specifically, to a liquid level balancing device and a dual temperature control system. Background Technology

[0002] With the rapid development of the semiconductor industry, higher demands have been placed on temperature control systems. In semiconductor manufacturing, many advanced processes require switching between different operating temperatures for the same process reaction chamber or user end within a short period. This sometimes involves rapidly heating from a low temperature to a high temperature, or rapidly cooling from a high temperature to a low temperature. To address this, a dual-temperature control system has been developed, consisting of two independently controlled temperature control units with distinct temperature presets, which work together to serve the same user end via a switching valve.

[0003] Each temperature control loop in such a dual-temperature control system typically includes a reservoir to hold the circulating medium, compensate for changes in medium volume, and stabilize system pressure. However, during long-term operation of the two loops, due to differences in temperature, operating conditions, and unavoidable minor leaks, the liquid levels in the two reservoirs and the system pressure will gradually deviate. Too low a liquid level may cause cavitation damage to the circulation pump, and pressure imbalance may affect temperature control accuracy and the smoothness of the switching process.

[0004] The existing solution is to simply connect the two liquid storage tanks through a pipe. Although this method can automatically balance the liquid level, it causes the working media of the two temperature control loops to mix directly, resulting in severe heat crosstalk. This leads to large temperature fluctuations in the two loops and excessively long stabilization times, thus affecting production efficiency.

[0005] Therefore, how to reduce heat crosstalk during the liquid level balancing process has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this application is to disclose a liquid level balancing device to reduce heat crosstalk during the liquid level balancing process.

[0007] Another objective of this application is to disclose a dual temperature control system including the above-mentioned liquid level balancing device.

[0008] A liquid level balancing device includes a first liquid storage tank, a second liquid storage tank, and a liquid level balancing pipe;

[0009] The first liquid storage tank and the second liquid storage tank are respectively used to store the media of the first temperature control circulation loop and the second temperature control circulation loop;

[0010] The interior of the first liquid storage tank is divided into a first operating area and a first buffer area by a first partition. The first operating area is connected to the first temperature control circulation loop, and the first buffer area is connected to the first operating area. The first operating area is located below the first buffer area.

[0011] The interior of the second liquid storage tank is divided into a second operating area and a second buffer area by a second partition. The second operating area is connected to the second temperature control circulation loop, and the second buffer area is connected to the second operating area. The second operating area is located below the second buffer area.

[0012] The two ends of the liquid level balancing tube are respectively connected to the first buffer area and the second buffer area.

[0013] One possible implementation is that a first flow-limiting hole is provided on the first partition, and the first buffer area and the first running area are connected through the first flow-limiting hole;

[0014] The second partition is provided with a second flow-limiting hole, and the second buffer area and the second running area are connected through the second flow-limiting hole.

[0015] One possible implementation is that the orifice diameter of the first flow-limiting orifice and / or the second flow-limiting orifice is configured such that the flow resistance of the fluid flowing through it is greater than the flow resistance of the fluid flowing through the liquid level balancing pipe.

[0016] One possible implementation is that the diameters of the first flow-limiting orifice and the second flow-limiting orifice are 5 mm to 15 mm.

[0017] One possible implementation is that the volume of the first running area is smaller than the volume of the first cache area; and / or the volume of the second running area is smaller than the volume of the second cache area.

[0018] In one possible implementation, the first connection interface between the liquid level balancing pipe and the first buffer area is configured such that, in the direction from the first operating area to the first buffer area, the distance between the first connection interface and the first partition is less than 1 / 5 of the height of the first buffer area.

[0019] And / or, the second connection interface between the liquid level balancing pipe and the second buffer zone is configured such that, in the direction from the second operating zone to the second buffer zone, the distance between the second connection interface and the second partition is less than 1 / 5 of the height of the second buffer zone.

[0020] One possible implementation is that the liquid level balancing pipe is equipped with a balancing valve, which is used to control the connection and closure of the liquid level balancing pipe.

[0021] During the operation of the liquid level balancing device disclosed in this application: taking the operating temperature of the first temperature control loop being higher than that of the second temperature control circulation loop as an example, when the dual temperature control system switches from the second temperature control circulation loop to the first temperature control loop, some of the medium in the first temperature control loop will enter the second temperature control circulation loop, causing the temperature of the second operating zone of the second storage tank to rise. As the medium expands, the liquid level in the second operating zone tends to rise, and pressure drives a small amount of medium to slowly enter the second buffer zone. A liquid level difference appears between the first and second buffer zones, and the medium will flow to the first buffer zone through the liquid level balancing pipe, achieving overall liquid level balance between the first and second storage tanks. Throughout the entire liquid level balancing process, the media in the two operating zones are effectively isolated by the partition and the flow-limiting orifice, resulting in minimal thermal crosstalk.

[0022] Compared to related technologies, the liquid level balancing device disclosed in this application significantly reduces the risk of thermal crosstalk by physically limiting the convection mixing and heat conduction between the working media of the two temperature-controlled circulation loops through internal partitioning of the storage tank. The liquid level balancing pipe achieves automatic balance of pressure and overall liquid level between the two temperature-controlled loops, compensating for thermal expansion and contraction and minor leaks.

[0023] A dual temperature control system, comprising:

[0024] First temperature control circulation loop;

[0025] The second temperature control circulation loop has a medium temperature greater than that of the first temperature control circulation loop.

[0026] A switching component, configured to connect the user terminal to the first temperature control loop and / or the second temperature control loop;

[0027] The liquid level balancing device is any of the above possible implementations of the liquid level balancing device.

[0028] In one possible implementation, the first temperature control circulation loop includes a first liquid inlet branch and a first liquid return branch. The first liquid inlet branch is connected to the liquid outlet of the first operating area and the liquid inlet of the user end. The first liquid return branch is connected to the liquid outlet of the user end and the liquid inlet of the first operating area. A first valve is connected in series on the first liquid inlet branch, and a third valve is connected in series on the first liquid return branch.

[0029] The second temperature control circulation loop includes a second liquid inlet branch and a second liquid return branch. The second liquid inlet branch is connected to the liquid outlet of the second operating area and the liquid inlet of the user end. The second liquid return branch is connected to the liquid outlet of the user end and the liquid inlet of the second operating area. A fourth valve is connected in series on the second liquid inlet branch, and a sixth valve is connected in series on the second liquid return branch.

[0030] One possible implementation is that the first temperature control circulation loop includes a first self-circulating branch, which is connected to the liquid outlet and liquid inlet of the first operating area, and a second valve is connected in series on the first self-circulating branch.

[0031] The second temperature control circulation loop includes a second self-circulation branch, which is connected to the liquid outlet and liquid inlet of the second operating zone, and a fifth valve is connected in series on the second self-circulation branch.

[0032] Since the dual temperature control system includes the liquid level balancing device in any of the above possible implementations, it also possesses the aforementioned beneficial effects, which will not be elaborated upon further here. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments or related technologies of this application, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is an external view of the liquid level balancing device disclosed in the embodiments of this application;

[0035] Figure 2 This is a schematic diagram of the internal structure of the liquid level balancing device disclosed in the embodiments of this application;

[0036] Figure 3 This is a top view of the internal structure of the liquid level balancing device disclosed in the embodiments of this application;

[0037] Figure 4 This is a structural diagram of the dual temperature control system disclosed in the embodiments of this application.

[0038] The attached figures are labeled as follows:

[0039] 10. First temperature control circulation loop; 20. Second temperature control circulation loop; 30. User terminal;

[0040] 100. First liquid storage tank; 110. First buffer zone; 120. First operating zone; 130. First partition; 131. First flow limiting orifice;

[0041] 200. Second liquid storage tank; 210. Second buffer zone; 220. Second operating zone; 230. Second partition; 231. Second flow limiting orifice;

[0042] 300. Balancing valve;

[0043] 400, Liquid level balance tube; 410, First connection interface; 420, Second connection interface;

[0044] 500. Switching component; 510. First valve; 520. Second valve; 530. Third valve; 540. Fourth valve; 550. Fifth valve; 560. Sixth valve;

[0045] 600. Connecting pipeline; 610. First inlet branch; 620. First return branch; 630. Second inlet branch; 640. Second return branch; 650. First self-circulating branch; 660. Second self-circulating branch. Detailed Implementation

[0046] The first aspect of this application is to disclose a liquid level balancing device to reduce heat crosstalk during the liquid level balancing process.

[0047] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0048] See Figure 1 and Figure 2 The liquid level balancing device disclosed in this application is used in a dual temperature control system. The dual temperature control system includes a first temperature control circulation loop 10 and a second temperature control circulation loop 20, which can switch between the first temperature control circulation loop 10 and the second temperature control circulation loop 20 to achieve two different temperature controls according to different user temperature control needs. The liquid level balancing device includes a first liquid storage tank 100, a second liquid storage tank 200, and a liquid level balancing pipe 400.

[0049] The first liquid storage tank 100 is internally divided into two independent chambers by a horizontally arranged first partition 130: a first operating area 120 and a first buffer area 110. When the liquid level balancing device is operating normally, the first operating area 120 is located below the first buffer area 110, facilitating natural flow of the medium between the two areas by gravity. The first operating area 120 is equipped with a pipe interface for connecting to the pipes of the first temperature-controlled circulation loop 10, thus making the first liquid storage tank 100 a liquid storage unit of the first temperature-controlled circulation loop 10. The first operating area 120 and the first buffer area 110 are connected by pipes or connecting holes, but fluid exchange is limited by high flow resistance.

[0050] The second liquid storage tank 200 is structurally mirror-symmetrical to the first liquid storage tank 100. Its interior is divided into a second operating area 220 and a second buffer area 210 by a second partition 230. The second operating area 220 is equipped with a pipeline interface for connecting to the second temperature control circulation loop 20. The second operating area 220 and the second buffer area 210 are also interconnected.

[0051] The liquid level balancing pipe 400 is set horizontally, with its two ends connected to the first buffer zone 110 and the second buffer zone 210, respectively.

[0052] During the operation of the liquid level balancing device disclosed in this application: taking the operating temperature of the first temperature control circulation loop 10 as greater than that of the second temperature control circulation loop 20 as an example, when the dual temperature control system switches from the second temperature control circulation loop 20 to the first temperature control circulation loop 10, some of the medium in the first temperature control circulation loop 10 will enter the second temperature control circulation loop 20, causing the temperature of the second operating zone 220 of the second storage tank 200 to rise. As the medium expands, causing the liquid level in the second operating zone 220 to rise, pressure drives a small amount of medium to slowly enter the second buffer zone 210. A liquid level difference appears between the first buffer zone 110 and the second buffer zone 210, and the medium will flow to the first buffer zone 110 through the liquid level balancing pipe 400, achieving overall liquid level balance between the first storage tank 100 and the second storage tank 200. Throughout the liquid level balancing process, the media in the two operating zones are effectively isolated by the partition and the flow limiting orifice, resulting in minimal thermal crosstalk.

[0053] Compared to related technologies, the liquid level balancing device disclosed in this application significantly reduces the risk of thermal crosstalk by physically limiting the convection mixing and heat conduction between the working media of the two temperature-controlled circulation loops through internal partitioning of the storage tank. Automatic balance of pressure and overall liquid level between the two temperature-controlled loops is achieved through the liquid level balancing pipe 400, compensating for thermal expansion and contraction and minor leaks.

[0054] In one specific embodiment, a first flow-limiting orifice 131 is provided on the first partition 130. The first flow-limiting orifice 131, through its simple structure, connects the first buffer zone 110 and the first operating zone 120, while also limiting the mass exchange and diffusion rate between the fluids on both sides, thus preventing large-scale natural convection. The number of first flow-limiting orifices 131 can be multiple. For example... Figure 3 As shown, two first flow-limiting holes 131 are formed on the first partition 130. The two first flow-limiting holes 131 are arranged at intervals, allowing the fluid in most areas of the first operating zone 120 to establish an effective pressure balance channel, reducing fluid dead zones and improving the uniformity of pressure transmission and response speed throughout the entire chamber. The second partition 230 may also have second flow-limiting holes 231, and the second buffer zone 210 and the second operating zone 220 are connected through the second flow-limiting holes 231.

[0055] To achieve effective dynamic liquid level balance and static medium isolation, the orifice diameters of the first flow-limiting orifice 131 and / or the second flow-limiting orifice 231 are configured such that the flow resistance of the fluid flowing through them is greater than that of the fluid flowing through the liquid level balancing pipe 400. Specifically, the diameter of the liquid level balancing pipe 400 can be set significantly larger than the orifice diameter of the first flow-limiting orifice 131, resulting in very low fluid communication resistance between the first buffer zone 110 and the second buffer zone 210. When there is a pressure or liquid level difference between the two storage tanks, it can respond quickly and tend to liquid level balance. The high flow resistance of the flow-limiting orifice greatly suppresses natural thermal convection between the two operating zones and their adjacent buffer zones caused by temperature differences. This allows the flow-limiting orifice to structurally connect the two areas while the partition can functionally provide effective thermal isolation.

[0056] In one specific embodiment, the orifice diameters of the first flow-limiting orifice 131 and the second flow-limiting orifice 231 are 5 mm to 15 mm. When the orifice diameters of both the first flow-limiting orifice 131 and the second flow-limiting orifice 231 are set to 5 mm, the flow resistance is very high. Under this configuration, the fluid exchange through the orifice is negligible, and thermal crosstalk is suppressed to a minimum. However, its response to pressure changes is also relatively slow, making it suitable for processes with low temperature switching frequency but requiring absolute isolation. Setting the orifice diameter to 15 mm is suitable for applications where the operating temperatures of the two temperature control loops are relatively close, or where the system requires high dynamic response speed. The larger orifice diameter reduces flow resistance, allowing pressure to be transmitted more quickly through the small orifice to the balance buffer when the temperature of one loop changes drastically, and then rapidly affecting the other system through the liquid level balance pipe 400, thereby more quickly smoothing the pressure difference between the systems and protecting the circulating pump.

[0057] Optionally, in this embodiment, the orifice diameter is set to 10 mm. This orifice diameter provides good overall performance in most application scenarios. On the one hand, it provides sufficient flow resistance to ensure that thermal convection between the first operating zone 120 and the second operating zone 220 is effectively limited during steady-state operation, without affecting temperature control accuracy. On the other hand, this orifice diameter allows for appropriate fluid passage when system pressure fluctuates, enabling the liquid level balancing device to effectively compensate for thermal expansion and contraction, achieving an optimal balance between system stability and responsiveness. In practical design, the orifice diameter value can be precisely selected or finely adjusted within the above range based on the viscosity of the circulating medium, the system operating pressure range, and specific process parameters.

[0058] In one specific embodiment, the volume allocation of the two functional zones within the storage tank can be differentiated. In the first storage tank 100, the volume of the first operating zone 120, which participates in the external circulation, is designed to be smaller than the volume of the first buffer zone 110. For example, the volume of the first operating zone 120 is 1 / 10 to 1 / 5 of the volume of the first buffer zone 110. In actual design, the volume ratio can be determined by comprehensive calculation based on the maximum operating temperature difference of the dual temperature control system, the coefficient of volumetric expansion of the medium, and the total liquid volume of the system. Similarly, in the second storage tank 200, the volume of the second operating zone 220 is also smaller than the volume of the second buffer zone 210, and follows a similar proportional relationship. As the area where the working medium directly participates in the circulation, the operating zone's volume is designed to ensure that the circulation pipeline, temperature control unit, and user terminal 30 are filled with the medium while leaving a minimum expansion margin. A smaller volume helps reduce system thermal inertia and accelerate temperature response. The buffer zone, as the primary media storage area, needs to have sufficient volume to absorb the volume expansion of the media in the main circulation zone on the other side caused by drastic temperature changes, while also providing compensation reserves for minor leaks during long-term operation. This design enables the device to cope with drastic changes in fluid volume caused by rapid, large temperature differences, further improving the long-term operational stability and reliability of the dual temperature control system under harsh process conditions.

[0059] To ensure stable long-term system operation, the connection position of the liquid level balancing pipe 400 can be further optimized. The first connection interface 410 between the liquid level balancing pipe 400 and the first buffer zone 110 is positioned at a distance of only 1 / 5 of the height of the first buffer zone 110 from the first partition 130. The height of the first buffer zone 110 is the vertical distance from the upper surface of the first partition 130 to the top surface of the first buffer zone 110 when the liquid level balancing device is in normal operation. Similarly, the second connection interface 420 of the liquid level balancing pipe 400 in the second buffer zone 210 is also close to the second partition 230. With this layout, even if the liquid level in the storage tank drops after long-term operation, the first connection interface 410 and the second connection interface 420 will always remain below the liquid surface in the storage tank, preventing the liquid level balancing function from failing and thus ensuring stable long-term system operation.

[0060] Based on the above embodiment, a balancing valve 300 is installed on the liquid level balancing pipe 400. This balancing valve 300 can be a solenoid valve or a manual ball valve. A solenoid valve facilitates integration into a control system for automatic control. A manual ball valve allows for manual disconnection of the liquid level balancing pipe 400 during long-term system maintenance or repair, enabling operation of individual storage tanks or temperature control loops. During system operation, closing the balancing valve 300 completely severs the connection between the first buffer zone 110 and the second buffer zone 210, making the two storage tanks and their respective temperature control circulation loops essentially independent in terms of fluid flow, eliminating any convective heat exchange through the liquid level balancing pipe 400. Opening the balancing valve 300 restores the liquid level balancing function of the device. This design allows for the selection of enabling or disabling the balancing function according to real-time process requirements, providing absolute isolation for processes with extreme temperature differences and expanding the applicability of the device.

[0061] Another aspect of this application discloses a dual temperature control system, such as Figure 4 As shown. The system includes a first temperature-controlled circulation loop 10, a second temperature-controlled circulation loop 20, a switching component 500, and a liquid level balancing device. The liquid level balancing device is any of the liquid level balancing devices described above. The medium temperature of the first temperature-controlled circulation loop 10 is higher than the medium temperature of the second temperature-controlled circulation loop 20. The first temperature-controlled circulation loop 10 and the second temperature-controlled circulation loop 20 include circulation pumps and heating or cooling equipment to provide a medium at the required process temperature. The user terminal 30 can selectively connect to either the first temperature-controlled circulation loop 10 or the second temperature-controlled circulation loop 20 via the switching component 500 to achieve rapid temperature switching.

[0062] In one specific embodiment, the piping connection of the dual temperature control system is as follows: The first temperature control circulation loop 10 includes a first inlet branch 610 and a first return branch 620. The first inlet branch 610 is connected to the outlet of the first operating zone 120 and the inlet of the user terminal 30, and the first return branch 620 is connected to the outlet of the user terminal 30 and the inlet of the first operating zone 120. The switching component 500 consists of multiple valves. A first valve 510 is connected in series on the first inlet branch 610, and a third valve 530 is connected in series on the first return branch 620. The second temperature control circulation loop 20 includes a second liquid inlet branch 630 and a second liquid return branch 640. The second liquid inlet branch 630 is connected to the liquid outlet of the second operating zone 220 and the liquid inlet of the user end 30. The second liquid return branch 640 is connected to the liquid outlet of the user end 30 and the liquid inlet of the second operating zone 220. A fourth valve 540 is connected in series on the second liquid inlet branch 630, and a sixth valve 560 is connected in series on the second liquid return branch 640.

[0063] To simplify pipeline connections, the first inlet branch 610 and the second inlet branch 630 can be connected to a parallel main pipe via a tee connector, which is then connected to the inlet end of the user terminal 30. Similarly, the first return branch 620 and the second return branch 640 can also be connected in parallel via a tee connector.

[0064] In the operation of the dual temperature control system disclosed in this embodiment, when the user terminal 30 performs high-temperature control, the first valve 510 and the third valve 530 are in the open state, and the fourth valve 540 and the sixth valve 560 are in the closed state, so that the user terminal 30 is connected to the first temperature control circulation loop 10. When the user terminal 30 performs low-temperature control, the fourth valve 540 and the sixth valve 560 are in the open state, and the first valve 510 and the third valve 530 are in the closed state, so that the user terminal 30 is connected to the second temperature control circulation loop 20. At this time, the system is in a stable state, and the medium in the storage tank does not flow between the operating area and the buffer area.

[0065] When the system switches temperatures, for example, from the second temperature control loop 20 to the first temperature control loop 10, the first valve 510 and the sixth valve 560 open, while the third valve 530 and the fourth valve 540 close. The medium from the first storage tank 100 is supplied to the user terminal 30 through the first inlet branch 610 and enters the second operating zone 220 of the second storage tank 200 through the second return branch 640, causing the temperature of the second operating zone 220 of the second storage tank 200 to rise. The medium then slowly enters the second buffer zone 210. The second buffer zone 210 and the first buffer zone 110 are then balanced by the level balancing pipe 400. Once the system temperature stabilizes, the first valve 510 and the third valve 530 open, while the fourth valve 540 and the sixth valve 560 close, and the first temperature control loop 10 stably provides thermal management for the user terminal 30.

[0066] The first temperature-controlled circulation loop 10 may further include a first self-circulating branch 650. The first self-circulating branch 650 is connected to the outlet and inlet of the first operating zone 120, and a second valve 520 is connected in series on the first self-circulating branch 650. The second temperature-controlled circulation loop 20 further includes a second self-circulating branch 660, which is connected to the outlet and inlet of the second operating zone 220, and a fifth valve 550 is connected in series on the second self-circulating branch 660. Circulating pumps and heating or cooling equipment are provided on the first self-circulating branch 650 and the second self-circulating branch 660 to maintain the temperature of the medium in the loop.

[0067] When the user terminal 30 is connected to the first temperature control circulation loop 10, the second valve 520 is in the closed state and the fifth valve 550 is in the open state. The medium in the second temperature control circulation loop 20 circulates in the second operating zone 220 and the second self-circulation branch 660.

[0068] Since the dual temperature control system includes the liquid level balancing device in any of the above possible implementations, it also possesses the aforementioned beneficial effects, which will not be elaborated upon further here.

[0069] The terms "first" and "second," etc., used in the specification and claims of this application are used to distinguish different objects, not to describe a specific order, and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units may include steps or units not listed, but rather steps or units not listed. Additionally, in the description of embodiments in this application, "a plurality of" means two or more.

[0070] In the description of this application, it should be understood that the terms "height," "thickness," "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. In the description of this application, "a plurality of" means two or more, and "at least one" can mean one, two, or more, unless otherwise expressly specified.

[0071] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Specific technical means in some embodiments may be incorporated, in whole or in part, into another embodiment unless explicitly excluded by another embodiment. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A liquid level balancing device for a dual temperature control system, characterized in that, It includes a first liquid storage tank (100), a second liquid storage tank (200), and a liquid level balance pipe (400); The first liquid storage tank (100) and the second liquid storage tank (200) are respectively used to store the media of the first temperature control circulation loop (10) and the second temperature control circulation loop (20); The first liquid storage tank (100) is divided into a first operating area (120) and a first buffer area (110) by a first partition (130). The first operating area (120) is connected to the first temperature control circulation loop (10), and the first buffer area (110) is connected to the first operating area (120). The first operating area (120) is located below the first buffer area (110). The interior of the second liquid storage tank (200) is divided into a second operating area (220) and a second buffer area (210) by a second partition (230). The second operating area (220) is connected to the second temperature control circulation loop (20), and the second buffer area (210) is connected to the second operating area (220). The second operating area (220) is located below the second buffer area (210). The two ends of the liquid level balancing pipe (400) are respectively connected to the first buffer area (110) and the second buffer area (210).

2. The liquid level balancing device as described in claim 1, characterized in that, The first partition (130) is provided with a first flow limiting hole (131), and the first buffer area (110) and the first operating area (120) are connected through the first flow limiting hole (131); The second partition (230) has a second flow-limiting hole (231), and the second buffer area (210) and the second operating area (220) are connected through the second flow-limiting hole (231).

3. The liquid level balancing device as described in claim 2, characterized in that, The orifice diameters of the first flow-limiting orifice (131) and / or the second flow-limiting orifice (231) are configured such that the flow resistance of the fluid flowing through them is greater than the flow resistance of the fluid flowing through the liquid level balancing pipe (400).

4. The liquid level balancing device as described in claim 3, characterized in that, The diameters of the first flow-limiting orifice (131) and the second flow-limiting orifice (231) are 5 mm to 15 mm.

5. The liquid level balancing device as described in claim 1, characterized in that, The volume of the first running area (120) is smaller than the volume of the first cache area (110); and / or the volume of the second running area (220) is smaller than the volume of the second cache area (210).

6. The liquid level balancing device as described in claim 1, characterized in that, The first connection interface (410) connecting the liquid level balancing pipe (400) to the first buffer area (110) is configured such that, in the direction from the first operating area (120) to the first buffer area (110), the distance between the first connection interface (410) and the first partition (130) is less than 1 / 5 of the height of the first buffer area (110); And / or, the second connection interface (420) connecting the liquid level balancing pipe (400) to the second buffer zone (210) is configured such that, in the direction from the second operating area (220) to the second buffer zone (210), the distance between the second connection interface (420) and the second partition (230) is less than 1 / 5 of the height of the second buffer zone (210).

7. The liquid level balancing device as described in claim 1, characterized in that, The liquid level balancing pipe (400) is equipped with a balancing valve (300), which is used to control the connection and closure of the liquid level balancing pipe (400).

8. A dual temperature control system, characterized in that, include: First temperature control circulation loop (10); The second temperature control circulation loop (20) has a medium temperature greater than that of the first temperature control circulation loop (10); A switching component (500) is configured to connect the user terminal (30) to the first temperature control loop (10) and / or the second temperature control loop (20); The liquid level balancing device is the liquid level balancing device as described in any one of claims 1 to 7.

9. The liquid level balancing device as described in claim 8, characterized in that, The first temperature control circulation loop (10) includes a first liquid inlet branch (610) and a first liquid return branch (620). The first liquid inlet branch (610) is connected to the liquid outlet of the first operating area (120) and the liquid inlet of the user terminal (30). The first liquid return branch (620) is connected to the liquid outlet of the user terminal (30) and the liquid inlet of the first operating area (120). A first valve (510) is connected in series on the first liquid inlet branch (610), and a third valve (530) is connected in series on the first liquid return branch (620). The second temperature control circulation loop (20) includes a second liquid inlet branch (630) and a second liquid return branch (640). The second liquid inlet branch (630) is connected to the liquid outlet of the second operating area (220) and the liquid inlet of the user end (30). The second liquid return branch (640) is connected to the liquid outlet of the user end (30) and the liquid inlet of the second operating area (220). A fourth valve (540) is connected in series on the second liquid inlet branch (630), and a sixth valve (560) is connected in series on the second liquid return branch (640).

10. The liquid level balancing device as described in claim 9, characterized in that, The first temperature control circulation loop (10) includes a first self-circulating branch (650), which is connected to the liquid outlet and liquid inlet of the first operating area (120), and a second valve (520) is connected in series on the first self-circulating branch (650). The second temperature control circulation loop (20) includes a second self-circulating branch (660), which is connected to the liquid outlet and liquid inlet of the second operating area (220). A fifth valve (550) is connected in series on the second self-circulating branch (660).

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