A lithium niobate / lithium tantalate thin film polarization method with precise control of periodic domain reversal duty cycle

By employing an asymmetric interdigitated electrode structure in lithium niobate/lithium tantalate thin films, the problem of lateral expansion during ferroelectric domain inversion is solved, achieving precise control and stability of the duty cycle. This is suitable for the efficient fabrication of nonlinear optical frequency conversion devices and on-chip quantum light sources.

CN122522415APending Publication Date: 2026-08-07SHANDONG UNIV
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Patent Information

Application Number
CN202610414621.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-31
Publication Date
2026-08-07

AI Technical Summary

Technical Problem

In the existing technology, the periodic polarization method for lithium niobate/lithium tantalate thin films suffers from the uncontrollable lateral expansion of ferroelectric domains during the reversal process, which causes the duty cycle of the reversal region to depend on process parameters, making it difficult to achieve stable and repeatable high-efficiency nonlinear optical device fabrication.

Method used

By employing an asymmetric interdigitated electrode structure and designing an asymmetric array of anode and cathode fingers, a spatially non-uniform electric field distribution is formed, which restricts the ferroelectric domain inversion region and achieves precise control and stability of the duty cycle.

Benefits of technology

It achieves precise confined control of the ferroelectric domain inversion region, reduces dependence on polarization voltage and pulse parameters, improves device consistency and manufacturing repeatability, and is applicable to a variety of nonlinear photonic devices.

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Abstract

The application relates to a lithium niobate / lithium tantalate thin film polarization method for accurate control of a period domain reversal duty cycle, which comprises the following steps: S1, providing a lithium niobate / lithium tantalate thin film as a polarization substrate; S2, defining an asymmetric interdigital electrode pattern on the surface of the polarization substrate; S3, forming a metal layer on the polarization substrate after step S2 through metal deposition, and then forming an asymmetric interdigital electrode through a stripping process; and S4, applying a high-voltage pulse sequence on the asymmetric interdigital electrode to drive the ferroelectric domains in the lithium niobate / lithium tantalate thin film to be periodically reversed. According to the method, the electric field distribution is geometrically preset controlled through the asymmetric interdigital electrode structure, the ferroelectric domain reversal region is mainly defined by the electrode structure, and thus the polarization result is less dependent on the accurate adjustment of the voltage amplitude and pulse parameters.
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