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Method for measuring concentration of water in argon, hydrogen, nitrogen and helium by means of ionization mobility spectrometry

A technology of mobility and spectroscopy, which is applied in the fields of material analysis, chemical method analysis, time-of-flight spectrometer, etc. by electromagnetic means

Inactive Publication Date: 2005-11-02
SAES GETTERS SPA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the presence of water in argon, RIP disappears with concentrations of about 10-15 ppb; therefore, at this state of the art, this value is the maximum limit of determination for impurities in argon by IMS techniques

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  • Method for measuring concentration of water in argon, hydrogen, nitrogen and helium by means of ionization mobility spectrometry
  • Method for measuring concentration of water in argon, hydrogen, nitrogen and helium by means of ionization mobility spectrometry
  • Method for measuring concentration of water in argon, hydrogen, nitrogen and helium by means of ionization mobility spectrometry

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Embodiment

[0041] The invention is further described by the following examples, which relate to a series of experiments with the analysis of water at different concentrations in argon. In all these tests, the gas mixture flowing into the IMS apparatus 10 was kept equal to 0.5 liters / minute and the gas temperature was 110°C. pass 63 Ni radiation source for sample ionization. The ions thus generated are neutralized on the grid 13 until the voltage of the latter cancels out, thereby allowing them to enter the separation region 12 . The offset time of the gate voltage was 200 microseconds (μs) for each trial. Tests were carried out with the IMS apparatus 10 in which the separation zone 12 was 8 cm long; the accelerating electric field in each test was equal to 128 V / cm. Under these conditions, typical drift times for the substances present in the test are generally comprised between 15-30 milliseconds (ms) from preliminary guided tests; moreover, under these conditions, H 3 o + and (H ...

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Abstract

A method for measuring by means of ionization mobility spectrometry relatively high concentrations of water in argon, hydrogen, nitrogen and helium, characterized by comprising the followings operative steps: -introducing the gas to be analyzed into an IMS instrument (10) with a counter- flow ofpure gas; -obtaining a signal (19) variable during the time and proportional to the number of ions detected by an ion detector (14) of the IMS instrument (10); -determining two time intervals (A, B) corresponding to the drift times in the IMS instrument (10) of the H30<+> and (H20)2<+> ions; -obtaining the peaks of said signal (19) in the two determined time intervals (A, B); -calculating the water concentration in the gas to be analyzed according to the 15 ratio between the intensity of the two peaks obtained in the signal (19).

Description

field of invention [0001] The present invention relates to a method for determining the concentration of water in argon, hydrogen, nitrogen and helium by ionization mobility spectroscopy. Background of the invention [0002] These gases are widely used in the semiconductor industry, as transport gases for diluting reactive species or as carrier gases for forming plasmas in cathodic deposition processes (specifically, helium and argon are used for these purposes), and as non-conducting gases in this process. kinetic reagents (especially in the case of nitrogen). Of these gases, argon is the most important to the industry: in the remainder of the text, it is this gas that will be mainly referred to, but the invention can also achieve the same results for the other cited gases. [0003] The purity of argon used in the semiconductor industry is of particular importance, in fact, contaminants that may be present in these reagents or in the reaction environment can be added to th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/00G01N27/64G01N31/00H01J49/40
CPCG01N27/622G01N27/00
Inventor L·普斯特拉A·博纽西M·苏西R·斯蒂麦克
Owner SAES GETTERS SPA