Nitride based compound semiconductor light emitting element and mfg. method thereof
一种发光元件、化合物的技术,应用在半导体器件、电气元件、电固体器件等方向,能够解决光发层92不能发光、减小发光元件90发光效率、不能稳定地发光等问题,达到高发光可靠性、高发光效率的效果
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Embodiment 1
[0043] figure 1 is a front cross-sectional view of a nitride-based compound semiconductor light-emitting element 10 according to Example 1 of the present invention. The nitride-based compound semiconductor light-emitting element 10 includes a laminated body 9 approximately in the shape of a rectangular parallelepiped.
[0044] The laminated body 9 includes: a P-type base electrode (conductive layer) 13 approximately in the shape of a rectangular parallelepiped; a P-type electrode 12 arranged on the P-type base electrode 13; a P-type electrode 12 arranged on the P-type electrode 12. Nitride-based compound semiconductor contact layer 6; a P-type nitride-based compound semiconductor layer 5 arranged on the P-type nitride-based compound semiconductor contact layer 6; a MQW ( Multi-quantum well) light-emitting layer 4; an N-type nitride-based compound semiconductor layer 3 disposed on the MQW light-emitting layer 4; and an aluminum nitride (AlN) buffer layer disposed on the N-type ...
Embodiment 2
[0074] image 3 is a front cross-sectional view of a nitride-based compound semiconductor light-emitting element 20 according to Example 2 of the present invention. exist image 3 in, with reference to figure 1 The same elements of the described nitride-based compound semiconductor light-emitting element 10 of Example 1 are denoted by the same reference numerals, and their descriptions will be omitted. The difference between the nitride-based compound semiconductor light-emitting element 20 according to Embodiment 2 and the nitride-based compound semiconductor light-emitting element 10 according to Embodiment 1 is that a nitride-based compound semiconductor layer 3A containing N-type indium (In) is further provided on N type nitride-based compound semiconductor layer 3.
[0075] The nitride-based compound semiconductor light-emitting element 20 includes a laminated body 9A substantially in the shape of a rectangular parallelepiped.
[0076] The laminate 9A includes: a P-t...
Embodiment 3
[0097] Figure 5 is a front sectional view of a nitride-based compound semiconductor light-emitting element 30 according to Example 3 of the present invention. exist Figure 5 in, with reference to figure 1 The same elements as described in the nitride-based compound semiconductor light-emitting element 10 according to Embodiment 1 are denoted by the same reference numerals, and their descriptions will be omitted. In the nitride-based compound semiconductor light-emitting element 30 according to Embodiment 3, an AlGaN buffer layer 2B is provided instead of the AlN buffer layer 2, grooves 11A and 11B are formed in the AlGaN buffer layer 2B instead of the groove 11, and formed N-type oxide semiconductor 7A is formed instead of N-type transparent electrode 7 . The nitride-based compound semiconductor light-emitting element 30 includes a laminated body 9B substantially in the shape of a rectangular parallelepiped.
[0098] The laminate 9B includes: a P-type base electrode 13 ...
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