Sucking method and apparatus of functional droplet ejecting head, photo-electric device and manufacturing method thereof
A technology of suction device and functional liquid, which is applied in the field of suction and device of functional droplet ejection head, photoelectric device and its manufacturing, can solve the problem of inability to ensure suction, difficulty in miniaturization, and long time required for filling functional liquid And other issues
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[0098] Next, Embodiment 2 of the present invention will be described. The basic structure of the droplet discharge device 1 of this embodiment is substantially the same as that of the above-mentioned first embodiment, but in the droplet discharge device 1 of the second embodiment, the point of difference is that: The working fluid is not compressed air from the air supply unit 5, but a functional fluid.
[0099] if refer to Figure 9 To illustrate, the supply port 102 of the injector 101 is connected to the functional liquid pump 201 composed of a high-pressure pump through the pressure regulating valve 202, and the discharge port 104 is connected to the recycling container 162 (storage pipe) through the connecting pipe 203 (discharging line). container). Also, in the present embodiment, the suction force of the ejector 101 is adjusted by controlling the pressure of the functional liquid delivered from the functional liquid pump 201 using the pressure adjustment valve 202 . ...
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