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Double-wavelength nanometer-precision real-time interferometer

An interferometric, dual-wavelength technology, applied to measuring devices, instruments, optical devices, etc., can solve the problems of not being able to measure in real time, and the measurement accuracy is only up to microns

Inactive Publication Date: 2002-12-11
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

The interferometer has greatly improved the measurement range and can be used for the measurement of tiny objects, but the measurement accuracy is still only up to microns, and it cannot be measured in real time

Method used

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  • Double-wavelength nanometer-precision real-time interferometer
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  • Double-wavelength nanometer-precision real-time interferometer

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Embodiment Construction

[0047] Such as figure 1 structure shown. The ratio ω of the sinusoidal phase modulation angular frequency between the first light source 13 and the second light source 5 by controlling the trigger controller 2 c1 / ω c2 =10. Wherein the first light source 13 and the second light source 5 adopt wavelengths respectively λ 1 = 1305.0nm and λ 2 =1308.0nm distributed feedback semiconductor laser (DFB-LD), synthesized wavelength λ eIt is 568.98ìm. The photoelectric conversion element 9 is a photodiode. The antireflection element 12 is an optical fiber connector. The multiplexer element 7 is a fiber coupler. The beam splitting ratio of the fiber coupler 8 is 1:1. The reflectivity of the partially reflective element 12 is 27%. When starting the measurement, first turn on the first light source 13 and the second light source 5, and use the first temperature controller 18 and the second temperature controller 4 to stabilize the temperatures of the first light source 13 and the ...

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Abstract

The real-time interferometer is suitable for measurement of static displacement. It includes two different-wavelength light sources with driving power source and temperature controller. The transmission path of the emitted light beam is inside the optical fiber, wave synthesizing element and the fiber coupler. A trigger controller is connected between the two driving power source for the control of initial phase. The photoelectronic converting element converts the received interference signal into electric signal input to the signal processor. The signal processor has the other two inputs connected to the two driving power sources. The processed data are displayed in a digital display. Compared with available technology, the present invention can obtain real-time measurement result and two orders of magnitude higher precision.

Description

Technical field: [0001] The invention relates to a real-time interferometer with dual-wavelength nanometer precision, in particular to a dual-wavelength nanometer-precision interferometer using sinusoidal phase modulation interferometry. Background technique: [0002] In optical precision interferometry, sinusoidal phase modulation interferometry is a high-precision measurement. Displacement measurement can reach nanometer precision, but the measurement range is only half the wavelength of the light source. In order to solve this problem, Osami Sasaki and others at Niigata University in Japan provided a dual-wavelength semiconductor laser interferometer in 1991 (prior technology [1]: "Two-wavelenlength sinusoidalphase-modulating laser-diode interferometer insensitive to external disturbances,"Applied Optics, Vol.30, No.28, 4040-4045). In this interferometer, two light sources are used, and the measurement range of the displacement is expanded to 152μm by using the synthetic...

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Application Information

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IPC IPC(8): G01B9/02G01B11/04
Inventor 王学锋王向朝刘英明钱锋
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI