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Method and apparatus for particle detection using sensor structure having movable portion

A technology of sensor devices and moving parts, applied in the direction of electrical components, circuits, discharge tubes, etc., can solve the problems of expensive special equipment, slow typical characteristics, etc.

Inactive Publication Date: 2003-09-10
VARIAN SEMICON EQUIP ASSOC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although these techniques give satisfactory results, they are typically slow and require relatively expensive specialized equipment

Method used

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  • Method and apparatus for particle detection using sensor structure having movable portion
  • Method and apparatus for particle detection using sensor structure having movable portion
  • Method and apparatus for particle detection using sensor structure having movable portion

Examples

Experimental program
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Embodiment Construction

[0026] A functional block diagram of a particle detection device 100 according to an embodiment of the invention is shown in the attached figure 1 shown. In this example, the sensor device 10 is a cantilever comprising a fixed part 11 and a movable part 12 . The fixing part 11 is fixed on the pad 13 , and the pad 13 is fixed on the base 14 . The sensor device 10 is preferably made of polycrystalline, although other semiconducting, conducting or insulating materials could also be used if desired. However, the sensor device 10 is preferably made of a material that allows elastic deformation of the sensor device 10 when it is struck by one or more particles. Liner 13 is preferably made of a layer of insulating material, such as silicon dioxide, but other materials are also possible. The base 14 is preferably silicon, such as single crystal silicon, although other materials can be used as with other devices.

[0027] The sensor device 10 is preferably fabricated using well-kno...

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PUM

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Abstract

A method and apparatus for particle detection. Detected particles can be charged or uncharged and can be detected based on momentum transfer from moving particles to a sensor structure and / or electrostatic deflection of a sensor structure resulting from an accumulation of charged particles on the sensor structure. The sensor structure can be or include a cantilever arm having a fixed end and a free end. Movement of the free end can be caused by impacting of particles on the cantilever arm. Movement of the free end can be detected in various ways, including determining a change in direction of a light beam reflected by the cantilever arm, detecting activation of an electronic switching element caused by movement of the cantilever arm, detecting changes in capacitance of a capacitor caused by movement of the arm, etc.

Description

field of invention [0001] The present invention relates to the detection of moving particles using a sensor device with moving parts. The invention can be used to detect charged particles in ion beams used to incorporate impurities into semiconductor wafers. Background of the invention [0002] Detecting small particles in motion, such as those that can range in size from a single atom to about 0.1 microns, can have many different applications. One application is in the ion implantation system, which implants high-energy ions into relatively large working parts, such as semiconductor wafers. The well known ion implantation, or doping, process, of implanting ions or other particles into semiconductor materials is widely used in the fabrication of semiconductor devices. [0003] Two important factors related to ion implantation are the uniformity of ion implantation over the surface of the workpiece and ensuring that the particles hit the workpiece at a constant or nearly co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/04H01J37/244H01J37/317
CPCH01J37/244H01J37/317
Inventor 方紫薇史蒂文·R·沃尔特苏珊·B·费尔奇朱安尼塔·S·索尼科
Owner VARIAN SEMICON EQUIP ASSOC INC