Rotary coating method and apparatus, and mask for said method and apparatus
A technology of spin coating and masking, applied to spin coating and equipment, which can solve the problems of low-quality discs and lower disc quality
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[0062] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.
[0063] figure 1 is a plan view of a spin coating apparatus for an optical disk as an embodiment of the present invention. This spin coating apparatus is an apparatus suitable for forming a light-transmitting layer of a blue laser disk which is a next-generation disk.
[0064] The blue laser disc specially used for reproduction is made by forming an aluminum reflective film on a polycarbonate substrate with a diameter of 120mm and a thickness of 1.1mm, and has information pits formed by sputtering, and can be used as a A light (UV, ie, ultraviolet light) hardening resin of a radiation hardening material is spin-coated on its surface, thereby forming a light-transmitting layer with a thickness of 100 μ. The apparatus of this embodiment is an apparatus for realizing such spin-coating of a light-transmitting layer.
[0065] The spin coating device 1 is e...
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Abstract
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