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Method and system for coupling waveguides

A technology of waveguide and alloy, applied in the coupling of optical waveguide, optical waveguide light guide, light guide, etc.

Inactive Publication Date: 2006-06-28
李凤勋 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, traditionally this may require precise alignment of active and passive components in order to obtain the desired coupling efficiency

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  • Method and system for coupling waveguides
  • Method and system for coupling waveguides
  • Method and system for coupling waveguides

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Embodiment Construction

[0017] It is to be understood that the drawings and descriptions of the present invention have been simplified in order to illustrate elements that are relevant to a clear understanding of the present invention, and for the sake of brevity, in typical PICS, active devices, passive devices and coupling methods Many other elements seen have been omitted. Those skilled in the art will recognize that other elements may be required in practicing the invention. However, since such elements are well known in the industry, and since they do not contribute to a better understanding of the present invention, a discussion of such elements is not provided here. This disclosure also covers all such changes and modifications within the knowledge of those skilled in the art.

[0018] According to one aspect of the present invention, waveguides based on amorphous silicon (a-Si, amorphous silicon) can be used for the integration of photonic integrated circuits (PIC, Photonic Integrated Circui...

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Abstract

A method for photonically coupling to at least one active photonic device structure formed on a substrate, includes: etching the active device structure with a high selectivity towards a crystallographic plane to form a sloped terminice with respect to the substrate; and, depositing at least one waveguide over the etched terminice and at least a portion of the substrate; wherein, the waveguide is photonically coupled to the etched active device structure to provide photonic interconnectivity for the etched active device structure.

Description

[0001] related technology [0002] This application asserts U.S. Patent Application No. 60 / 464,763, filed April 23, 2003, entitled "MULTIPLELAYER WAVEGUIDE STRUCTURES FOR A-SI BASEDPHOTONIC INTEGRATED CIRCUITS, SLOPED COUPLINGJOINT IN A-SI BASED PHOTONIC INTEGRATED CIRCUITSAND CIRCUITS INCLUDING SAME" Priority, the entire disclosure of which is hereby incorporated by reference as set forth herein in its entirety. technical field [0003] The present invention relates to waveguide coupling techniques, such as those used in conjunction with photonic integrated circuits. Background technique [0004] It is believed that the widespread development and promotion of Photonic Integrated Circuits (PICs), which include active components, III-V semiconductor photonic devices such as lasers and modulators, and photonic devices such as wireless Passive components such as source waveguides. Such circuits and devices may be monolithic in nature. One challenge in developing such a PIC i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/30G02B6/12G02B6/122G02B6/132G02B6/42H01L33/00H01L33/44H01L33/48
CPCG02B6/132G02B6/1223G02B6/122G02B2006/12121G02B6/12004G02B2006/12142B82Y20/00G02B2006/12123G02B6/424G02B6/24
Inventor 卓塞弗·阿贝尔斯大卫·卡培维尔卢·迪马尔科马丁·克瓦柯尔纳阿克纳根德拉纳斯·马雷胡曼·莫塞尼拉尔弗·惠利杨立友
Owner 李凤勋